Electrostatic measurement of plasma plume characteristics in pulsed laser evaporated carbon

R. M. Mayo, J. W. Newman, A. Sharma, Yukihiko Yamagata, J. Narayan

Research output: Contribution to journalArticle

31 Citations (Scopus)

Abstract

A triple Langmuir probe measurement was used to investigate plasma plume character in low fluence pulsed laser evaporation (PLE) discharges in diamond-like carbon film deposition. Initial findings from combined ion probe, visible spectroscopy, and film analysis is presented to provide a more detailed description of plasma plume characteristics and the relationship to film properties. Analytic modeling of the ion current in the supersonic plume allows an estimate of the ion number density throughout the plume.

Original languageEnglish
Pages (from-to)2865-2871
Number of pages7
JournalJournal of Applied Physics
Volume86
Issue number5
DOIs
Publication statusPublished - Jan 1 1999
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

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