Electrostatic measurement of plasma plume dynamics in pulsed laser evaporated graphite

R. M. Mayo, J. W. Newman, A. Sharma, J. Narayan, Y. Yamagata

Research output: Contribution to journalConference articlepeer-review

Abstract

Electrostatic (Langmuir) probe measurements were conducted in the carbon pulsed laser evaporation (PLE) plume to investigate plume dynamics and correlate against film properties. Preliminary results indicate electron densities on the order of 1012-1015 cm-3 and electron temperatures approximately 0.25-0.5 eV at 1 cm from the target surface. Plasma density is often observed to increase initially with probe-target separation distance before decreasing.

Original languageEnglish
Number of pages1
JournalIEEE International Conference on Plasma Science
Publication statusPublished - Dec 1 1999
Externally publishedYes
EventThe 26th IEEE International Conference on Plasma Science (ICOPS99) - Monterey, CA, USA
Duration: Jun 20 1999Jun 24 1999

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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