Emission characteristics of EUV light source by CO2 laser-produced Xe and Sn plasma

H. Tanaka, K. Akinaga, A. Takahashi, T. Okada

Research output: Contribution to journalConference article

12 Citations (Scopus)

Abstract

We propose CO2 laser-produced plasma as the extreme ultraviolet (EUV) light source for future optical lithography. The laser beam from a transversely-excited atmospheric (TEA) CO2 laser (4 J, 50 ns FWHM) was focused on a Xe gas target, a Xe cryogenic target and a nano-structured tin-based target to generate EUV radiation around 13.5 nm. The EUV pulse of about 100 ns in FWHM was measured 50 ns after the CO2 laser irradiation. The EUV spectra were measured by an X-ray CCD camera with a transmission grating spectrograph (TGS). A characteristic EUV spectrum was observed from CO2 laser produced Xe plasma. The EUV energy was measured by a Flying Circus II detecting system and an output energy of 3 mJ/pulse and a conversion efficiency of 0.2 % per 2π sr at 13.5 nm (2% B.W.) were obtained with Xe targets. These values are comparable to those of YAG laser-produced Xe plasma, indicating the potential scalability of the EUV light source using a CO2 laser produced plasma.

Original languageEnglish
Article number83
Pages (from-to)737-748
Number of pages12
JournalProceedings of SPIE - The International Society for Optical Engineering
Volume5448
Issue numberPART 2
DOIs
Publication statusPublished - Dec 1 2004
EventHigh-Power Laser Ablation V - Taos, NM, United States
Duration: Apr 25 2004Apr 30 2004

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All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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