Abstract
We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.
| Original language | English |
|---|---|
| Article number | 012010 |
| Journal | Journal of Physics: Conference Series |
| Volume | 518 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - Jan 1 2014 |
| Event | 26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan Duration: Sep 23 2013 → Sep 24 2013 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)
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Dong, X., Koga, K., Yamashita, D., Seo, H., Itagaki, N., Shiratani, M., Setsuhara, Y., Sekine, M., & Hori, M. (2014). Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence. Journal of Physics: Conference Series, 518(1), [012010]. https://doi.org/10.1088/1742-6596/518/1/012010