Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence

X. Dong, K. Koga, D. Yamashita, H. Seo, N. Itagaki, M. Shiratani, Y. Setsuhara, M. Sekine, M. Hori

Research output: Contribution to journal › Conference article

1 Citation (Scopus)

Abstract

We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.

Original languageEnglish
Article number012010
JournalJournal of Physics: Conference Series
Volume518
Issue number1
DOIs
Publication statusPublished - Jan 1 2014
Event26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan
Duration: Sep 23 2013 → Sep 24 2013

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magnetohydrodynamic flow
pressure dependence
flow velocity
spectroscopy
toluene
electron energy
high energy electrons
electron impact
energy
coefficients
excitation

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

Cite this

Emission spectroscopy of Ar + H2 + C7H8 plasmas : C7H8 flow rate dependence and pressure dependence. / Dong, X.; Koga, K.; Yamashita, D.; Seo, H.; Itagaki, N.; Shiratani, M.; Setsuhara, Y.; Sekine, M.; Hori, M.

In: Journal of Physics: Conference Series, Vol. 518, No. 1, 012010, 01.01.2014.

Research output: Contribution to journal › Conference article

Dong, X, Koga, K, Yamashita, D, Seo, H, Itagaki, N, Shiratani, M, Setsuhara, Y, Sekine, M & Hori, M 2014, 'Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence', Journal of Physics: Conference Series, vol. 518, no. 1, 012010. https://doi.org/10.1088/1742-6596/518/1/012010
Dong X, Koga K, Yamashita D, Seo H, Itagaki N, Shiratani M et al. Emission spectroscopy of Ar + H2 + C7H8 plasmas: C7H8 flow rate dependence and pressure dependence. Journal of Physics: Conference Series. 2014 Jan 1;518(1). 012010. https://doi.org/10.1088/1742-6596/518/1/012010
Dong, X. ; Koga, K. ; Yamashita, D. ; Seo, H. ; Itagaki, N. ; Shiratani, M. ; Setsuhara, Y. ; Sekine, M. ; Hori, M. / Emission spectroscopy of Ar + H2 + C7H8 plasmas : C7H8 flow rate dependence and pressure dependence. In: Journal of Physics: Conference Series. 2014 ; Vol. 518, No. 1.
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AU - Seo, H.

AU - Itagaki, N.

AU - Shiratani, M.

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