We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.
|Journal||Journal of Physics: Conference Series|
|Publication status||Published - 2014|
|Event||26th Symposium on Plasma Sciences for Materials, SPSM 2013 - Fukuoka, Japan|
Duration: Sep 23 2013 → Sep 24 2013
All Science Journal Classification (ASJC) codes
- Physics and Astronomy(all)