TY - JOUR
T1 - Emission spectroscopy of Ar + H2 + C7H8 plasmas
T2 - 26th Symposium on Plasma Sciences for Materials, SPSM 2013
AU - Dong, X.
AU - Koga, K.
AU - Yamashita, D.
AU - Seo, H.
AU - Itagaki, N.
AU - Shiratani, M.
AU - Setsuhara, Y.
AU - Sekine, M.
AU - Hori, M.
PY - 2014
Y1 - 2014
N2 - We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.
AB - We have studied toluene flow rate dependence and pressure dependence of Ar emission intensities at 425.9 nm, 750.4 nm and 811.5 nm for Ar + H2 + C7H8 plasmas. Electron density and the electron impact excitation rate coefficients are nearly the same for Ar(100%) and Ar+H2(33%) plasmas. Toluene addition leads to a decrease in the high energy electron density, whereas the effective electron temperature and low energy electron density remain almost the same. The effective electron temperature, and Ar metastable density and/or low energy electron density decrease significantly with increasing the total pressure from 0.1 to 5 Torr.
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U2 - 10.1088/1742-6596/518/1/012010
DO - 10.1088/1742-6596/518/1/012010
M3 - Conference article
AN - SCOPUS:84903473575
VL - 518
JO - Journal of Physics: Conference Series
JF - Journal of Physics: Conference Series
SN - 1742-6588
IS - 1
M1 - 012010
Y2 - 23 September 2013 through 24 September 2013
ER -