Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas

    Research output: Contribution to journalArticlepeer-review

    8 Citations (Scopus)

    Abstract

    Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being due to Fe neutrals and are divided into two groups with different time-of-flight distribution, which are fitted with shifted Maxwellian distribution. The most probable velocities are estimated to be 2×104 m/s and 1×104 m/s. Because of the apparent time lag between the emission of N2+ and that of an Fe neutral, it is considered that N2+ does not contribute to the nitridation of deposited thin film.

    Original languageEnglish
    Pages (from-to)L566-L568
    JournalJapanese Journal of Applied Physics, Part 2: Letters
    Volume36
    Issue number5 A
    DOIs
    Publication statusPublished - 1997

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy (miscellaneous)
    • Physics and Astronomy(all)

    Fingerprint Dive into the research topics of 'Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas'. Together they form a unique fingerprint.

    Cite this