Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas

Tsuyoshi Yoshitake

doi:10.1143/jjap.36.l566

Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas

Tsuyoshi Yoshitake

Research output: Contribution to journal › Article › peer-review

8 Citations (Scopus)

Abstract

Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being due to Fe neutrals and are divided into two groups with different time-of-flight distribution, which are fitted with shifted Maxwellian distribution. The most probable velocities are estimated to be 2×10⁴ m/s and 1×10⁴ m/s. Because of the apparent time lag between the emission of N₂⁺ and that of an Fe neutral, it is considered that N₂⁺ does not contribute to the nitridation of deposited thin film.

Original language	English
Pages (from-to)	L566-L568
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	36
Issue number	5 A
DOIs	https://doi.org/10.1143/jjap.36.l566
Publication status	Published - 1997

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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title = "Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas",

abstract = "Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being due to Fe neutrals and are divided into two groups with different time-of-flight distribution, which are fitted with shifted Maxwellian distribution. The most probable velocities are estimated to be 2×104 m/s and 1×104 m/s. Because of the apparent time lag between the emission of N2+ and that of an Fe neutral, it is considered that N2+ does not contribute to the nitridation of deposited thin film.",

author = "Tsuyoshi Yoshitake",

year = "1997",

doi = "10.1143/jjap.36.l566",

language = "English",

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journal = "Japanese Journal of Applied Physics, Part 2: Letters",

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T1 - Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas

AU - Yoshitake, Tsuyoshi

PY - 1997

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N2 - Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being due to Fe neutrals and are divided into two groups with different time-of-flight distribution, which are fitted with shifted Maxwellian distribution. The most probable velocities are estimated to be 2×104 m/s and 1×104 m/s. Because of the apparent time lag between the emission of N2+ and that of an Fe neutral, it is considered that N2+ does not contribute to the nitridation of deposited thin film.

AB - Time-resolved emission measurements for an expanding plume during laser ablation of Fe in nitrogen gas are performed. Most emissions are identified as being due to Fe neutrals and are divided into two groups with different time-of-flight distribution, which are fitted with shifted Maxwellian distribution. The most probable velocities are estimated to be 2×104 m/s and 1×104 m/s. Because of the apparent time lag between the emission of N2+ and that of an Fe neutral, it is considered that N2+ does not contribute to the nitridation of deposited thin film.

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JO - Japanese Journal of Applied Physics, Part 2: Letters

JF - Japanese Journal of Applied Physics, Part 2: Letters

IS - 5 A

ER -

Emission studies of the plume produced by KrF laser ablation of Fe in ambient nitrogen gas

Abstract

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