Energy dependence of angular distributions of sputtered particles by ion-beam bombardment at normal incidence

Yoshinobu Matsuda, Yasutoshi Ueda, Kiichiro Uchino, Katsunori Muraoka, Masanori Akazaki, Yasunori Yamamura, Mitsuo Maeda

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The angular distributions of sputtered Fe-atoms were measured using the laser fluorescence technique during Ar-ion bombardment for energies of 0.6, 1, 2 and 3 keV at normal incidence. The measured cosine distribution at 0.6 keV progressively deviated to an over-cosine distribution at higher energies, and at 3 keV the angular distribution was an overcosine distribution of about 20%. The experimental results agree qualitatively with calculations by a recent computer simulation code, ACAT. The results are explained by the competition between surface scattering and the effects of primary knock-on atoms, which tend to make the angular distributions over-cosine and under-cosine, respectively.

Original languageEnglish
Pages (from-to)8-11
Number of pages4
JournalJapanese Journal of Applied Physics
Issue number1
Publication statusPublished - Jan 1 1986


All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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