Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement

Hiroshi Nakashima, Hajime Kitagawa, Kimio Hashimoto, Hajime Tomokage

    Research output: Contribution to journalArticle

    9 Citations (Scopus)
    Original languageEnglish
    Number of pages1
    JournalJapanese Journal of Applied Physics
    Volume23
    Issue number6R
    DOIs
    Publication statusPublished - Jan 1 1984

    Fingerprint

    Electron energy levels
    Cobalt
    cobalt
    solubility
    Solubility
    energy levels
    Silicon
    silicon
    profiles

    All Science Journal Classification (ASJC) codes

    • Engineering(all)
    • Physics and Astronomy(all)

    Cite this

    Energy Level and Solid Solubility of Cobalt in Silicon by In-Depth Profile Measurement. / Nakashima, Hiroshi; Kitagawa, Hajime; Hashimoto, Kimio; Tomokage, Hajime.

    In: Japanese Journal of Applied Physics, Vol. 23, No. 6R, 01.01.1984.

    Research output: Contribution to journalArticle

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