Enhanced oxidation of Si using low-temperature oxidation catalyst SrTi1− x Mg x O3−δ

Li Li, Akihiro Ikeda, Tanemasa Asano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)06GJ05
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume55
Publication statusPublished - 2016

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