Enhanced oxidation of Si using low-temperature oxidation catalyst SrTi1− x Mg x O3−δ

Li Li, Akihiro Ikeda, Tanemasa Asano

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	06GJ05
Journal	Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume	55
Publication status	Published - 2016

Cite this

@article{c7687a070df2407899511a7050ff8008,

title = "Enhanced oxidation of Si using low-temperature oxidation catalyst SrTi1− x Mg x O3−δ",

author = "Li Li and Akihiro Ikeda and Tanemasa Asano",

year = "2016",

language = "English",

volume = "55",

pages = "06GJ05",

journal = "Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes",

issn = "0021-4922",

publisher = "Institute of Physics",

}

TY - JOUR

T1 - Enhanced oxidation of Si using low-temperature oxidation catalyst SrTi1− x Mg x O3−δ

AU - Li, Li

AU - Ikeda, Akihiro

AU - Asano, Tanemasa

PY - 2016

Y1 - 2016

M3 - Article

SN - 0021-4922

VL - 55

SP - 06GJ05

JO - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

JF - Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes

ER -