Enhanced thermal oxidation using Sr Ti1-x Mgx O3-δ catalyst and its application　to 4H-SiC

Li Li, Akihiro Ikeda, Tanemasa Asano

Research output: Contribution to conference › Paper

Original language	English
Pages	442-445
Publication status	Published - Jul 2016
Event	Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices - Duration: Jul 4 2016 → …

Conference	Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
Period	7/4/16 → …

Li, L., Ikeda, A., & Asano, T. (2016). Enhanced thermal oxidation using Sr Ti1-x Mgx O3-δ catalyst and its application　to 4H-SiC. 442-445. Paper presented at Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, .

@conference{a9748406f8b8476fa755f08d2a5654f4,

title = "Enhanced thermal oxidation using Sr Ti1-x Mgx O3-δ catalyst and its application　to 4H-SiC",

author = "Li Li and Akihiro Ikeda and Tanemasa Asano",

year = "2016",

month = "7",

language = "English",

pages = "442--445",

note = "Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices ; Conference date: 04-07-2016",

}