Enhanced thermal oxidation using Sr Ti1-x Mgx O3-δ catalyst and its application to 4H-SiC

Li Li, Akihiro Ikeda, Tanemasa Asano

Research output: Contribution to conferencePaper

Original languageEnglish
Pages442-445
Publication statusPublished - Jul 2016
EventAsia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices -
Duration: Jul 4 2016 → …

Conference

ConferenceAsia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices
Period7/4/16 → …

Cite this

Li, L., Ikeda, A., & Asano, T. (2016). Enhanced thermal oxidation using Sr Ti1-x Mgx O3-δ catalyst and its application to 4H-SiC. 442-445. Paper presented at Asia-Pacific Workshop on Fundamentals and Applications of Advanced Semiconductor Devices, .