TY - GEN
T1 - Enhanced wettability of cubic boron nitride films by plasma treatment
AU - Yang, Jason Hsiao Chun
AU - Kawakami, Shinji
AU - Teii, Kungen
AU - Matsumoto, Seiichiro
PY - 2014
Y1 - 2014
N2 - The wettability of hydrogen plasma-treated cubic boron nitride (cBN) films is studied. The films are prepared on Si substrates by inductively coupled plasma (ICP)-enhanced chemical vapor deposition, and further treated by pure hydrogen ICP and microwave plasma (MWP) separately. The surface roughness of the films and the cBN content in the films show only minor changes after the plasma treatment in any treatment condition. The contact angle of polar water and apolar 1-bromonaphthalene is reduced greatly with the ICP post-treatment, while it is reduced only moderately with the MWP post-treatment. The highly hydrophilic behavior with very low contact angles is attributed to a marked increase in the polar component of the apparent surface free energy up to 34 mJ/m2.
AB - The wettability of hydrogen plasma-treated cubic boron nitride (cBN) films is studied. The films are prepared on Si substrates by inductively coupled plasma (ICP)-enhanced chemical vapor deposition, and further treated by pure hydrogen ICP and microwave plasma (MWP) separately. The surface roughness of the films and the cBN content in the films show only minor changes after the plasma treatment in any treatment condition. The contact angle of polar water and apolar 1-bromonaphthalene is reduced greatly with the ICP post-treatment, while it is reduced only moderately with the MWP post-treatment. The highly hydrophilic behavior with very low contact angles is attributed to a marked increase in the polar component of the apparent surface free energy up to 34 mJ/m2.
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U2 - 10.4028/www.scientific.net/msf.783-786.2051
DO - 10.4028/www.scientific.net/msf.783-786.2051
M3 - Conference contribution
AN - SCOPUS:84904581849
SN - 9783038350736
T3 - Materials Science Forum
SP - 2051
EP - 2055
BT - THERMEC 2013
A2 - Mishra, B.
A2 - Ionescu, Mihail.
A2 - Chandra, T.
PB - Trans Tech Publications Ltd
T2 - 8th International Conference on Processing and Manufacturing of Advanced Materials, THERMEC 2013
Y2 - 2 December 2013 through 6 December 2013
ER -