Epitaxial CVD growth of graphene: Growth mechanism, nanofabrication, and properties

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    1 Citation (Scopus)

    Abstract

    Graphene is emerging as a new material for future applications in electronics, mechanics, optics, and energy. Recently, catalytic chemical vapor deposition (CVD) growth has attracted considerable interest as an effective means of producing large-area graphene films with relatively low cost. However, because most of the CVD growth has been done over polycrystalline metal films or foils, as-grown graphene has relatively small grain size and its orientation is not controlled. Here, I present our recent studies on our epitaxial CVD growth of graphene using the crystalline metal films deposited on sapphire c-plane and MgO substrates. The domain structure is discussed in terms of crystalline plane dependence of the catalyst Cu film. Further development of this epitaxial graphene film to fabricate nanoribbon structures as well as the catalytic growth of graphene nanoribbons is also demonstrated.

    Original languageEnglish
    Title of host publicationProceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices
    Subtitle of host publicationTFT Technologies and FPD Materials, AM-FPD 2013
    Pages55-58
    Number of pages4
    Publication statusPublished - Nov 22 2013
    Event20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 - Kyoto, Japan
    Duration: Jul 2 2013Jul 5 2013

    Publication series

    NameProceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013

    Other

    Other20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013
    CountryJapan
    CityKyoto
    Period7/2/137/5/13

    All Science Journal Classification (ASJC) codes

    • Hardware and Architecture
    • Electrical and Electronic Engineering

    Fingerprint Dive into the research topics of 'Epitaxial CVD growth of graphene: Growth mechanism, nanofabrication, and properties'. Together they form a unique fingerprint.

  • Cite this

    Ago, H. (2013). Epitaxial CVD growth of graphene: Growth mechanism, nanofabrication, and properties. In Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013 (pp. 55-58). [6617776] (Proceedings of the 20th International Workshop on Active-Matrix Flatpanel Displays and Devices: TFT Technologies and FPD Materials, AM-FPD 2013).