Epitaxial growth of β-SiC by tetramethylsilane supersonic free jets: precursor control effects

Yoshifumi Ikoma, Fumiya Watanabe, Teruaki Motooka

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)221-224
JournalInstitute of Physics Conference Series
Volume142
Publication statusPublished - 1996

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