Epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface

Engineering

• Surfaces 50%
• Monolayer 50%
• Epitaxial Film 50%
• Scanning Tunneling Microscopy 50%
• Applications 25%
• Hydrogen Gas 25%
• Annealing 25%
• Energy Gap 25%
• Bridges 25%
• Double Layer 25%
• Layer Structure 25%
• Dangling Bond 25%

Physics

• Silicon 100%
• Oxynitrides 100%
• Annealing 25%
• Utilization 25%
• Etching 25%
• Air 25%
• Nitrogen 25%
• Silicon Nitride 25%

Material Science

• Surface 50%
• Monolayers 50%
• Epitaxial Layer 50%
• Cell 25%
• Devices 25%
• Etching 25%
• Air 25%
• Protective Atmosphere 25%
• Silicate 25%
• Low-Energy Electron Diffraction 25%