Erosion of carbon deposition layer by hydrogen RF plasma

Kazunari Katayama, H. Nagase, C. Nishinakamura, T. Takeishi, M. Nishikawa

Research output: Contribution to journalConference article

4 Citations (Scopus)

Abstract

A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.

Original languageEnglish
Pages (from-to)247-252
Number of pages6
JournalFusion Engineering and Design
Volume81 A
Issue number1-4
DOIs
Publication statusPublished - Feb 1 2006
EventProceedings of the Seventh International Symposium on Fusion Nuclear Technology ISFNT-7 Part A -
Duration: May 22 2005May 27 2005

Fingerprint

Hydrogen
Erosion
Carbon
Plasmas
Plasma sheaths
Langmuir probes
Graphite
Sputtering
Ions

All Science Journal Classification (ASJC) codes

  • Civil and Structural Engineering
  • Materials Science(all)
  • Nuclear Energy and Engineering
  • Mechanical Engineering

Cite this

Erosion of carbon deposition layer by hydrogen RF plasma. / Katayama, Kazunari; Nagase, H.; Nishinakamura, C.; Takeishi, T.; Nishikawa, M.

In: Fusion Engineering and Design, Vol. 81 A, No. 1-4, 01.02.2006, p. 247-252.

Research output: Contribution to journalConference article

Katayama, K, Nagase, H, Nishinakamura, C, Takeishi, T & Nishikawa, M 2006, 'Erosion of carbon deposition layer by hydrogen RF plasma', Fusion Engineering and Design, vol. 81 A, no. 1-4, pp. 247-252. https://doi.org/10.1016/j.fusengdes.2005.09.030
Katayama, Kazunari ; Nagase, H. ; Nishinakamura, C. ; Takeishi, T. ; Nishikawa, M. / Erosion of carbon deposition layer by hydrogen RF plasma. In: Fusion Engineering and Design. 2006 ; Vol. 81 A, No. 1-4. pp. 247-252.
@article{f5be690c04c643c2ae07f9b34e2d7fb0,
title = "Erosion of carbon deposition layer by hydrogen RF plasma",
abstract = "A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.",
author = "Kazunari Katayama and H. Nagase and C. Nishinakamura and T. Takeishi and M. Nishikawa",
year = "2006",
month = "2",
day = "1",
doi = "10.1016/j.fusengdes.2005.09.030",
language = "English",
volume = "81 A",
pages = "247--252",
journal = "Fusion Engineering and Design",
issn = "0920-3796",
publisher = "Elsevier BV",
number = "1-4",

}

TY - JOUR

T1 - Erosion of carbon deposition layer by hydrogen RF plasma

AU - Katayama, Kazunari

AU - Nagase, H.

AU - Nishinakamura, C.

AU - Takeishi, T.

AU - Nishikawa, M.

PY - 2006/2/1

Y1 - 2006/2/1

N2 - A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.

AB - A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.

UR - http://www.scopus.com/inward/record.url?scp=31844440720&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=31844440720&partnerID=8YFLogxK

U2 - 10.1016/j.fusengdes.2005.09.030

DO - 10.1016/j.fusengdes.2005.09.030

M3 - Conference article

AN - SCOPUS:31844440720

VL - 81 A

SP - 247

EP - 252

JO - Fusion Engineering and Design

JF - Fusion Engineering and Design

SN - 0920-3796

IS - 1-4

ER -