Erosion of carbon deposition layer by hydrogen RF plasma

Kazunari Katayama, H. Nagase, C. Nishinakamura, T. Takeishi, M. Nishikawa

Research output: Contribution to journalConference article

4 Citations (Scopus)


A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.

Original languageEnglish
Pages (from-to)247-252
Number of pages6
JournalFusion Engineering and Design
Volume81 A
Issue number1-4
Publication statusPublished - Feb 1 2006
EventProceedings of the Seventh International Symposium on Fusion Nuclear Technology ISFNT-7 Part A -
Duration: May 22 2005May 27 2005


All Science Journal Classification (ASJC) codes

  • Civil and Structural Engineering
  • Materials Science(all)
  • Nuclear Energy and Engineering
  • Mechanical Engineering

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