Abstract
A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.
| Original language | English |
|---|---|
| Pages (from-to) | 247-252 |
| Number of pages | 6 |
| Journal | Fusion Engineering and Design |
| Volume | 81 A |
| Issue number | 1-4 |
| DOIs | |
| Publication status | Published - Feb 1 2006 |
| Event | Proceedings of the Seventh International Symposium on Fusion Nuclear Technology ISFNT-7 Part A - Duration: May 22 2005 → May 27 2005 |
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All Science Journal Classification (ASJC) codes
- Civil and Structural Engineering
- Materials Science(all)
- Nuclear Energy and Engineering
- Mechanical Engineering
Cite this
Erosion of carbon deposition layer by hydrogen RF plasma. / Katayama, Kazunari; Nagase, H.; Nishinakamura, C.; Takeishi, T.; Nishikawa, M.
In: Fusion Engineering and Design, Vol. 81 A, No. 1-4, 01.02.2006, p. 247-252.Research output: Contribution to journal › Conference article
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TY - JOUR
T1 - Erosion of carbon deposition layer by hydrogen RF plasma
AU - Katayama, Kazunari
AU - Nagase, H.
AU - Nishinakamura, C.
AU - Takeishi, T.
AU - Nishikawa, M.
PY - 2006/2/1
Y1 - 2006/2/1
N2 - A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.
AB - A carbon deposition layer was formed by sputtering method in hydrogen RF plasma at an RF power of 150 W and then eroded in a plasma at an RF power of 250 W. The sheath bias between plasma and the carbon deposition layer was measured to be about 10 V by Langmuir probe method. The erosion yield (C/ion) of carbon deposition layer was determined to be 0.31, which is one order of magnitude larger than that of isotropic graphite, 0.026. It was found that the plasma facing surface of the eroded carbon deposition layer became mesh-like and the inside of the layer became more porous. The atomic ratio of hydrogen to carbon (H/C) in the carbon deposition layer eroded for more than 6 h obviously decreased as compared to the initial value.
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U2 - 10.1016/j.fusengdes.2005.09.030
DO - 10.1016/j.fusengdes.2005.09.030
M3 - Conference article
AN - SCOPUS:31844440720
VL - 81 A
SP - 247
EP - 252
JO - Fusion Engineering and Design
JF - Fusion Engineering and Design
SN - 0920-3796
IS - 1-4
ER -