Estimation of negative ions in VHF SiH4/H2 plasma

Tsukasa Yamane, Shinya Nakano, Sachiko Nakao, Yoshiaki Takeuchi, Ryuta Ichiki, Hiroshi Muta, Kiichiro Uchino, Yoshinobu Kawai

Research output: Contribution to journalArticlepeer-review

2 Citations (Scopus)

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