Estimation of the mobility of low temperature polycrystalline silicon thin film transistors through deep learning

Engineering

• Accuracy 50%
• Captured Image 16%
• Channel Size 16%
• Characteristics 16%
• Deep Learning 50%
• Estimation 16%
• Excimer Laser 33%
• Images 66%
• Inspection Method 16%
• Laser Fluence 16%
• Low-Temperature 66%
• Lower Temperature 16%
• Measurer 16%
• Optical Microscope 33%
• Polysilicon 83%
• Polysilicon Film 16%
• Prediction 33%
• Si Substrate 16%
• Substrates 16%
• Surface Colour 16%
• Surface Morphology 16%
• Surfaces 16%
• Transfer Learning 16%
• Wavelength 16%

Physics

• Crystallization 33%
• Deep Learning 50%
• Estimates 16%
• Excimer Laser 33%
• Feedback 33%
• Film Thickness 16%
• Images 66%
• Laser Annealing 16%
• Mobility 100%
• Quality 16%
• Revisions 16%
• Silicon Films 33%
• Substrates 16%
• Surface Roughness 16%

Material Science

• Crystallization 33%
• Liquid Films 16%
• Morphology 16%
• Surface 16%
• Surface Morphology 16%
• Thin-Film Transistor 66%