Evaluation of β-FeSi₂/Si-interface using Ag-coating on Si surface

β-FeSi₂ films preferred to (100)-, (010)/(001)- and (101)/(110)-orientation on Ag-coated Si(100), Ag-coated Si(110) and Ag-coated Si(111) substrates, respectively. The full width at half maximum of the rocking curve of the β-FeSi₂ 800, 040 /004 and 202 /220 for the (100)-, (010)/(001)- and (101)/(110)-oriented β-FeSi₂ films were 0.59°, 0.20° and 0.18°, indicating the good perfect quality of the crystal orientation. The photoluminescence intensity of the (101)/(110)-orientated β-FeSi₂ films on Ag-coated Si(111) substrates was larger than the others, when the samples were indirectly excited by Ar-ion laser irradiation to the Si substrate side. The hetero-interface constituted with the β-FeSi₂ (101)/(110) plane and Si(111) plane seems to have the lowest density of non-radiative center. From the transmission electron microscope analysis, the hetero-interface constituted with the β-FeSi₂ (101)/(110) plane and Si(111) plane is considered as thermodynamically stable.