Evaluation of Ph precursors for liquid injection atomic layer deposition of Pb(ZrxTii.x)O3 thin films

Takayuki Watanabe, Susanne Hoffmann-Eifert, Cheol Seong Hwang, Rainer Wase

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Fingerprint

Dive into the research topics of 'Evaluation of Ph precursors for liquid injection atomic layer deposition of Pb(ZrxTii.x)O3 thin films'. Together they form a unique fingerprint.

Earth and Planetary Sciences

Engineering

Chemistry

Material Science

Chemical Engineering