TY - JOUR
T1 - Evaluation of sensor property for hydrogen and ethanol of zinc-doped tin-dioxide thin films fabricated by RF sputtering
AU - Sakaguchi, Isao
AU - Saito, Noriko
AU - Watanabe, Ken
AU - Adachi, Yutaka
AU - Suzuki, Taku T.
N1 - Funding Information:
This work was partly supported by JSPS KAKENHI Grant Numbers 15H01053, 15K13366 and 26420688.
Publisher Copyright:
© 2016 The Ceramic Society of Japan. All rights reserved.
PY - 2016/6
Y1 - 2016/6
N2 - Zinc-doped Tin-dioxide thin (SnO2) films were synthesized on c-alumina substrates by radio-frequency (rf ) sputtering. To fabricate zinc-doped SnO2 thin films with different concentrations of zinc, an insulating zinc-doped SnO2 target was placed on a conductive non-doped target. Thin films were then deposited at different flow rates of argon gas. Zinc concentration in the deposited SnO2 thin films increased with increasing flow rate of argon gas. Moreover, the SnO2 thin film with a zinc concentration of 2.2 × 1019/cm3 showed the highest gas-sensor response. It is concluded that this rf-sputtering growth method is a useful tool for identifying suitable materials compositions for creating gas sensor with response for hydrogen and ethanol.
AB - Zinc-doped Tin-dioxide thin (SnO2) films were synthesized on c-alumina substrates by radio-frequency (rf ) sputtering. To fabricate zinc-doped SnO2 thin films with different concentrations of zinc, an insulating zinc-doped SnO2 target was placed on a conductive non-doped target. Thin films were then deposited at different flow rates of argon gas. Zinc concentration in the deposited SnO2 thin films increased with increasing flow rate of argon gas. Moreover, the SnO2 thin film with a zinc concentration of 2.2 × 1019/cm3 showed the highest gas-sensor response. It is concluded that this rf-sputtering growth method is a useful tool for identifying suitable materials compositions for creating gas sensor with response for hydrogen and ethanol.
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U2 - 10.2109/jcersj2.16015
DO - 10.2109/jcersj2.16015
M3 - Article
AN - SCOPUS:84971631202
VL - 124
SP - 714
EP - 716
JO - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
JF - Nippon Seramikkusu Kyokai Gakujutsu Ronbunshi/Journal of the Ceramic Society of Japan
SN - 1882-0743
IS - 6
ER -