Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV

Takeo Kamino, Toshie Yaguchi, Yasushi Kuroda, Tsuyoshi Ohnishi, Tohru Ishitani, Yuichi Miyahara, Zenji Horita

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Abstract

Transmission electron microscopy (TEM) samples of an Mg-Al alloy has been prepared using a Ga-focused ion beam (FIB) milling at two different operating voltages of 10 kV and 40 kV to investigate the influence of the FIB energy on the sample quality. The fine structures of the samples have been studied using a high resolution TEM, and the concentration of the implanted Ga was analysed using an energy dispersive X-ray (EDX) analysis. The result of the TEM observation revealed that point defects were introduced to the sample finally milled at 40 kV but not at 10 kV. However, crystal lattice images and electron diffraction patterns were clearly observed on both the samples. The typical influence of the FIB energy was indicated in the elemental analysis. The relative Ga concentration in the thin sample finally milled at 10 kV was 1.0-2.0 at% that is less than half of 4.0-6.0 at% of the Ga concentration in the sample finally milled at 40 kV. A comparison between the experimental results of the Ga concentration measurement with simulation was also discussed.

Original languageEnglish
Pages (from-to)459-463
Number of pages5
JournalJournal of Electron Microscopy
Volume53
Issue number5
DOIs
Publication statusPublished - Dec 1 2004

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Focused ion beams
Transmission Electron Microscopy
ion beams
Ions
Transmission electron microscopy
transmission electron microscopy
evaluation
Electric potential
electric potential
Energy dispersive X ray analysis
Point defects
High resolution transmission electron microscopy
Electron diffraction
Crystal lattices
Diffraction patterns
Observation
X-Rays
Electrons
Chemical analysis
crystal lattices

All Science Journal Classification (ASJC) codes

  • Instrumentation

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Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV. / Kamino, Takeo; Yaguchi, Toshie; Kuroda, Yasushi; Ohnishi, Tsuyoshi; Ishitani, Tohru; Miyahara, Yuichi; Horita, Zenji.

In: Journal of Electron Microscopy, Vol. 53, No. 5, 01.12.2004, p. 459-463.

Research output: Contribution to journalArticle

Kamino, T, Yaguchi, T, Kuroda, Y, Ohnishi, T, Ishitani, T, Miyahara, Y & Horita, Z 2004, 'Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV', Journal of Electron Microscopy, vol. 53, no. 5, pp. 459-463. https://doi.org/10.1093/jmicro/dfh058
Kamino, Takeo ; Yaguchi, Toshie ; Kuroda, Yasushi ; Ohnishi, Tsuyoshi ; Ishitani, Tohru ; Miyahara, Yuichi ; Horita, Zenji. / Evaluation of TEM samples of an Mg-Al alloy prepared using FIB milling at the operating voltages of 10 kV and 40 kV. In: Journal of Electron Microscopy. 2004 ; Vol. 53, No. 5. pp. 459-463.
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AU - Miyahara, Yuichi

AU - Horita, Zenji

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