Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to "shadow effect" that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.
|Publication status||Published - 2009|
|Event||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan|
Duration: Dec 2 2009 → Dec 4 2009
|Other||5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009|
|Period||12/2/09 → 12/4/09|
All Science Journal Classification (ASJC) codes
- Industrial and Manufacturing Engineering