Evaluation of unstable behavior in micro-probe trapped by optical radiation pressure

Mitsutoshi Kobayashi; Terutake Hayashi; Yasuhiro Takaya

Evaluation of unstable behavior in micro-probe trapped by optical radiation pressure

Mitsutoshi Kobayashi, Terutake Hayashi, Yasuhiro Takaya

Research output: Contribution to conference › Paper › peer-review

Abstract

Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to "shadow effect" that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.

Original language	English
Publication status	Published - 2009
Externally published	Yes
Event	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 - Osaka, Japan Duration: Dec 2 2009 → Dec 4 2009

Other

Other	5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009
Country/Territory	Japan
City	Osaka
Period	12/2/09 → 12/4/09

All Science Journal Classification (ASJC) codes

Industrial and Manufacturing Engineering

Cite this

@conference{71c1cbfc1b024946a2ae2566e9c115b8,

title = "Evaluation of unstable behavior in micro-probe trapped by optical radiation pressure",

abstract = "Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to {"}shadow effect{"} that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.",

author = "Mitsutoshi Kobayashi and Terutake Hayashi and Yasuhiro Takaya",

year = "2009",

language = "English",

note = "5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 ; Conference date: 02-12-2009 Through 04-12-2009",

}

TY - CONF

T1 - Evaluation of unstable behavior in micro-probe trapped by optical radiation pressure

AU - Kobayashi, Mitsutoshi

AU - Hayashi, Terutake

AU - Takaya, Yasuhiro

PY - 2009

Y1 - 2009

N2 - Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to "shadow effect" that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.

AB - Recently, ultra-high accuracy coordinate measuring machine (Nano-CMM) is demanded to evaluate the geometrical shapes of high-integrated miniature products. The key element to achieve the Nano-CMM is the three-dimensional probe. In this study, the micro-sphere trapped by optical radiation pressures is proposed. The issue of the probe is that the probe position is unstably displaced due to "shadow effect" that is phenomenon that a part of trapping laser used is blocked by work while measurements. In this paper, this probe behavior caused by the shadow effect is investigated in order to improve the probe performances.

UR - http://www.scopus.com/inward/record.url?scp=84883324815&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84883324815&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:84883324815

T2 - 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009

Y2 - 2 December 2009 through 4 December 2009

ER -

Evaluation of unstable behavior in micro-probe trapped by optical radiation pressure

Abstract

Other

All Science Journal Classification (ASJC) codes

Other files and links

Fingerprint

Cite this