TY - JOUR
T1 - Experimental study on thermal characteristics of suspended platinum nanofilm sensors
AU - Zhang, Xing
AU - Xie, Huaqing
AU - Fujii, Motoo
AU - Takahashi, Koji
AU - Ikuta, Tatsuya
AU - Ago, Hiroki
AU - Abe, Hidekazu
AU - Shimizu, Tetsuo
PY - 2006/10/1
Y1 - 2006/10/1
N2 - In this paper, the thermal characteristics of suspended platinum (Pt) nanofilm sensors have been investigated experimentally. The Pt nanofilm sensors with the thickness of 28-40 nm, the width of 260-601 nm, and the length of 5.3-5.7 μm were fabricated by electron beam lithography, electron beam physical vapor deposition and isotropic/anisotropic etching processes. Based on the one-dimensional heat conduction model, the in-plane thermal conductivity of the nanofilm sensors was obtained from the linear relation of the volume-averaged temperature increase and the heating rate measured in vacuum. Furthermore, natural convection heat transfer coefficients of air around the suspended nanofilm sensors at the pressures ranging from 1 × 10-2 Pa to 1 atm were also investigated. The experimental results show that the in-plane thermal conductivities of the nanofilm sensors are much lower than those of the bulk values, the natural convection heat transfer coefficients are, however, very high at the atmospheric pressure.
AB - In this paper, the thermal characteristics of suspended platinum (Pt) nanofilm sensors have been investigated experimentally. The Pt nanofilm sensors with the thickness of 28-40 nm, the width of 260-601 nm, and the length of 5.3-5.7 μm were fabricated by electron beam lithography, electron beam physical vapor deposition and isotropic/anisotropic etching processes. Based on the one-dimensional heat conduction model, the in-plane thermal conductivity of the nanofilm sensors was obtained from the linear relation of the volume-averaged temperature increase and the heating rate measured in vacuum. Furthermore, natural convection heat transfer coefficients of air around the suspended nanofilm sensors at the pressures ranging from 1 × 10-2 Pa to 1 atm were also investigated. The experimental results show that the in-plane thermal conductivities of the nanofilm sensors are much lower than those of the bulk values, the natural convection heat transfer coefficients are, however, very high at the atmospheric pressure.
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U2 - 10.1016/j.ijheatmasstransfer.2006.04.016
DO - 10.1016/j.ijheatmasstransfer.2006.04.016
M3 - Article
AN - SCOPUS:33746238590
VL - 49
SP - 3879
EP - 3883
JO - International Journal of Heat and Mass Transfer
JF - International Journal of Heat and Mass Transfer
SN - 0017-9310
IS - 21-22
ER -