Extended knife-edge method for characterizing sub-10-nm X-ray beams

Soichiro Handa, Takashi Kimura, Hidekazu Mimura, Hirokatsu Yumoto, Satoshi Matsuyama, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, Kazuto Yamauchi

Research output: Contribution to journalArticle

4 Citations (Scopus)


We describe a method for characterizing sub-10-nm X-ray beams using knife-edge scanning with dark-field geometry. Beam profile measurement by the conventional dark-field method is simulated numerically, and the signal intensity is found to depend strongly on the incident angle of the beam components. A numerical procedure to correct the dependence and to determine the actual beam profile is presented.

Original languageEnglish
Pages (from-to)246-250
Number of pages5
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Issue number2-3
Publication statusPublished - May 1 2010
Externally publishedYes

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

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