Extremely Enhanced Diffusion of Nitrogen in 4H-SiC Observed in Liquid-Nitrogen Immersion Irradiation of Excimer Laser

Akihiro Ikeda, Daichi Marui, Hiroshi Ikenoue, Tanemasa Asano

Research output: Contribution to journalArticle

Original languageEnglish
Pages (from-to)448-451
JournalMaterials Science Forum
Volume821-823
Publication statusPublished - May 2015

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