TY - GEN
T1 - Fabrication and application of structured nanofiber on chip
AU - Yamamoto, Kazuhiro
AU - Yokoyama, Shiyoshi
AU - Otomo, Akira
PY - 2013
Y1 - 2013
N2 - We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.
AB - We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.
UR - http://www.scopus.com/inward/record.url?scp=84885452633&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84885452633&partnerID=8YFLogxK
U2 - 10.1109/CLEOPR.2013.6600413
DO - 10.1109/CLEOPR.2013.6600413
M3 - Conference contribution
AN - SCOPUS:84885452633
SN - 9781467364751
T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
T2 - 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
Y2 - 30 June 2013 through 4 July 2013
ER -