Fabrication and application of structured nanofiber on chip

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
DOIs
Publication statusPublished - Oct 18 2013
Event10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 - Kyoto, Japan
Duration: Jun 30 2013Jul 4 2013

Publication series

NamePacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

Other

Other10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013
CountryJapan
CityKyoto
Period6/30/137/4/13

Fingerprint

Nanofibers
chips
etching
Fabrication
fabrication
Wet etching
Substrates

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Yamamoto, K., Yokoyama, S., & Otomo, A. (2013). Fabrication and application of structured nanofiber on chip. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013 [6600413] (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600413

Fabrication and application of structured nanofiber on chip. / Yamamoto, Kazuhiro; Yokoyama, Shiyoshi; Otomo, Akira.

2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600413 (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Yamamoto, K, Yokoyama, S & Otomo, A 2013, Fabrication and application of structured nanofiber on chip. in 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013., 6600413, Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest, 10th Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013, Kyoto, Japan, 6/30/13. https://doi.org/10.1109/CLEOPR.2013.6600413
Yamamoto K, Yokoyama S, Otomo A. Fabrication and application of structured nanofiber on chip. In 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. 6600413. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest). https://doi.org/10.1109/CLEOPR.2013.6600413
Yamamoto, Kazuhiro ; Yokoyama, Shiyoshi ; Otomo, Akira. / Fabrication and application of structured nanofiber on chip. 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013. 2013. (Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest).
@inproceedings{3076372de45849f49a1e1079b9f5481a,
title = "Fabrication and application of structured nanofiber on chip",
abstract = "We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.",
author = "Kazuhiro Yamamoto and Shiyoshi Yokoyama and Akira Otomo",
year = "2013",
month = "10",
day = "18",
doi = "10.1109/CLEOPR.2013.6600413",
language = "English",
isbn = "9781467364751",
series = "Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest",
booktitle = "2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013",

}

TY - GEN

T1 - Fabrication and application of structured nanofiber on chip

AU - Yamamoto, Kazuhiro

AU - Yokoyama, Shiyoshi

AU - Otomo, Akira

PY - 2013/10/18

Y1 - 2013/10/18

N2 - We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.

AB - We proposed the fabrication method of nanofibers on Si substrate using FIB milling and selective wet etching for integrated optical applications. The diameter of nanofiber could be well-controlled from 2 μm to 300 nm.

UR - http://www.scopus.com/inward/record.url?scp=84885452633&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84885452633&partnerID=8YFLogxK

U2 - 10.1109/CLEOPR.2013.6600413

DO - 10.1109/CLEOPR.2013.6600413

M3 - Conference contribution

AN - SCOPUS:84885452633

SN - 9781467364751

T3 - Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest

BT - 2013 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2013

ER -