Fabrication and characterization of anatase/rutile-TiO2 thin films by magnetron sputtering: A review

Sakae Tanemura, Lei Miao, Wilfried Wunderlich, Masaki Tanemura, Yukimasa Mori, Shoichi Toh, Kenji Kaneko

    Research output: Contribution to journalReview articlepeer-review

    83 Citations (Scopus)


    This review article summarizes briefly some important achievements of our recent reserach on anatase and/or rutile TiO2 thin films, fabricated by helicon RF magnetron sputtering, with good crystal quality and high density, and gives the-state-of-the-art of the knowledge on systematic interrelationship for fabrication conditions, crystal structure, composition, optical properties, and bactericidal abilities, and on the effective surface treatment to improve the optical reactivity of the obtained films.

    Original languageEnglish
    Pages (from-to)11-17
    Number of pages7
    JournalScience and Technology of Advanced Materials
    Issue number1
    Publication statusPublished - Jan 2005

    All Science Journal Classification (ASJC) codes

    • Materials Science(all)

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