Fabrication and evaluation of molding and bonding tools for Au micromirror formation

Ryutaro Nishimura, Seiya Matsuoka, Eiji Higurashi, Tadatomo Suga, Renshi Sawada

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    In order to fabricate Au micromirrors using a method of simultaneous molding and low-temperature Au-Au bonding, a fabrication method of molding and bonding tools using diamond blade dicing is investigated. Diamond blade dicing of synthetic quartz glass substrates produced smooth sidewall surfaces with root-mean-square roughness of 8 nm in the sample translation direction and that of 56 nm in the perpendicular to the translation direction. Using these fabricated tools, Au micromirrors were successfully formed at 150 °C.

    Original languageEnglish
    Title of host publicationProceedings of 2017 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017
    PublisherInstitute of Electrical and Electronics Engineers Inc.
    Pages84
    Number of pages1
    ISBN (Electronic)9784904743034
    DOIs
    Publication statusPublished - Jun 13 2017
    Event5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017 - Tokyo, Japan
    Duration: May 16 2017May 18 2017

    Publication series

    NameProceedings of 2017 5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017

    Other

    Other5th International Workshop on Low Temperature Bonding for 3D Integration, LTB-3D 2017
    Country/TerritoryJapan
    CityTokyo
    Period5/16/175/18/17

    All Science Journal Classification (ASJC) codes

    • Electrical and Electronic Engineering
    • Industrial and Manufacturing Engineering
    • Electronic, Optical and Magnetic Materials
    • Surfaces, Coatings and Films

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