TY - JOUR
T1 - Fabrication and evaluation of trimethylmethoxysilane (TMMOS)-derived membranes for gas separation
AU - Mise, Yoshihiro
AU - Ahn, So Jin
AU - Takagaki, Atsushi
AU - Kikuchi, Ryuji
AU - Oyama, Shigeo Ted
N1 - Funding Information:
Funding: This research was supported by the Japan Science and Technology Agency under the CREST program, Grant Number JPMJCR16P2.
Publisher Copyright:
© 2019 by the authors.
PY - 2019/10
Y1 - 2019/10
N2 - Gas separation membranes were fabricated with varying trimethylmethoxysilane (TMMOS)/tetraethoxy orthosilicate (TEOS) ratios by a chemical vapor deposition (CVD) method at 650 °C and atmospheric pressure. The membrane had a high H2 permeance of 8.3 × 10-7 mol m-2 s-1 Pa-1 with H2/CH4 selectivity of 140 and H2/C2H6 selectivity of 180 at 300 °C. Fourier transform infrared (FTIR) measurements indicated existence of methyl groups at high preparation temperature (650 °C), which led to a higher hydrothermal stability of the TMMOS-derived membranes than of a pure TEOS-derived membrane. Temperature-dependence measurements of the permeance of various gas species were used to establish a permeation mechanism. It was found that smaller species (He, H2, and Ne) followed a solid-state diffusion model while larger species (N2, CO2, and CH4) followed a gas translational diffusion model.
AB - Gas separation membranes were fabricated with varying trimethylmethoxysilane (TMMOS)/tetraethoxy orthosilicate (TEOS) ratios by a chemical vapor deposition (CVD) method at 650 °C and atmospheric pressure. The membrane had a high H2 permeance of 8.3 × 10-7 mol m-2 s-1 Pa-1 with H2/CH4 selectivity of 140 and H2/C2H6 selectivity of 180 at 300 °C. Fourier transform infrared (FTIR) measurements indicated existence of methyl groups at high preparation temperature (650 °C), which led to a higher hydrothermal stability of the TMMOS-derived membranes than of a pure TEOS-derived membrane. Temperature-dependence measurements of the permeance of various gas species were used to establish a permeation mechanism. It was found that smaller species (He, H2, and Ne) followed a solid-state diffusion model while larger species (N2, CO2, and CH4) followed a gas translational diffusion model.
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U2 - 10.3390/membranes9100123
DO - 10.3390/membranes9100123
M3 - Article
AN - SCOPUS:85073437179
SN - 2077-0375
VL - 9
JO - Membranes
JF - Membranes
IS - 10
M1 - 123
ER -