TY - GEN
T1 - Fabrication of 3D ceramic micro channels by imprinting method
AU - Tokumaru, Kazuki
AU - Hunt, Simon
AU - Tsumori, Fujio
N1 - Funding Information:
This work was supported by JSPS Kakenhi Grant Numbers JP18J12174 and JP15H04161, and the Mitsui Foundation for the Advancement of Tool and Die Technology. The silica powder was kindly provided by Admatechs Co. ltd. The authors are grateful for theses supports.
Publisher Copyright:
Copyright© (2018) by Chemical and Biological Microsystems Society.All rights reserved.
PY - 2018
Y1 - 2018
N2 - Ceramic materials show superior properties in heat resistance, corrosion resistance, chemical resistance, strength, etc. compared to polymer materials. Thus, the ceramics are expected in many fields to be replaced from conventional polymer. However, ceramics are fragile and micro fabrication of channel is challenging. In this work, we developed the fabrication process of 3D ceramic micro channels by imprinting a laminated sheet of 2 compound sheets and a sacrificial sheet in between them. Our ceramic micro channels could be useful for highly efficient solid oxide fuel cells (SOFC), or micro electro mechanical systems (MEMS) used in harsh environments where polymer materials could not be applicable.
AB - Ceramic materials show superior properties in heat resistance, corrosion resistance, chemical resistance, strength, etc. compared to polymer materials. Thus, the ceramics are expected in many fields to be replaced from conventional polymer. However, ceramics are fragile and micro fabrication of channel is challenging. In this work, we developed the fabrication process of 3D ceramic micro channels by imprinting a laminated sheet of 2 compound sheets and a sacrificial sheet in between them. Our ceramic micro channels could be useful for highly efficient solid oxide fuel cells (SOFC), or micro electro mechanical systems (MEMS) used in harsh environments where polymer materials could not be applicable.
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M3 - Conference contribution
AN - SCOPUS:85079899716
T3 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
SP - 522
EP - 524
BT - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PB - Chemical and Biological Microsystems Society
T2 - 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Y2 - 11 November 2018 through 15 November 2018
ER -