Fabrication of 3D ceramic micro channels by imprinting method

Kazuki Tokumaru, Simon Hunt, Fujio Tsumori

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Ceramic materials show superior properties in heat resistance, corrosion resistance, chemical resistance, strength, etc. compared to polymer materials. Thus, the ceramics are expected in many fields to be replaced from conventional polymer. However, ceramics are fragile and micro fabrication of channel is challenging. In this work, we developed the fabrication process of 3D ceramic micro channels by imprinting a laminated sheet of 2 compound sheets and a sacrificial sheet in between them. Our ceramic micro channels could be useful for highly efficient solid oxide fuel cells (SOFC), or micro electro mechanical systems (MEMS) used in harsh environments where polymer materials could not be applicable.

Original languageEnglish
Title of host publication22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
PublisherChemical and Biological Microsystems Society
Pages522-524
Number of pages3
ISBN (Electronic)9781510897571
Publication statusPublished - 2018
Event22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018 - Kaohsiung, Taiwan, Province of China
Duration: Nov 11 2018Nov 15 2018

Publication series

Name22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
Volume1

Conference

Conference22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2018
CountryTaiwan, Province of China
CityKaohsiung
Period11/11/1811/15/18

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Bioengineering
  • Chemical Engineering (miscellaneous)
  • Control and Systems Engineering

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