Fabrication of a fiber probe using a CO2 laser for microstructure measurement: High functionality and durability test

Kosuke Uchiyama; Hiroshi Murakami; Akio Katsuki; Takao Sajima; Takahiko Yamamoto; Ryosuke Nagata; Kunitaka Fujiyoshi

doi:10.1016/j.procir.2018.08.249

Fabrication of a fiber probe using a CO₂ laser for microstructure measurement: High functionality and durability test

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

Manufacturing Process

Research output: Contribution to journal › Conference article › peer-review

2 Citations (Scopus)

Abstract

In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.

Original language	English
Pages (from-to)	513-516
Number of pages	4
Journal	Procedia CIRP
Volume	77
DOIs	https://doi.org/10.1016/j.procir.2018.08.249
Publication status	Published - 2018
Event	8th CIRP Conference on High Performance Cutting, HPC 2018 - Budapest, Hungary Duration: Jun 25 2018 → Jun 27 2018

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Industrial and Manufacturing Engineering

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10.1016/j.procir.2018.08.249

Cite this

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title = "Fabrication of a fiber probe using a CO2 laser for microstructure measurement: High functionality and durability test",

abstract = "In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.",

author = "Kosuke Uchiyama and Hiroshi Murakami and Akio Katsuki and Takao Sajima and Takahiko Yamamoto and Ryosuke Nagata and Kunitaka Fujiyoshi",

note = "Funding Information: This study was partly supported by the METI Supporting Industry Program, JSPS KAKENHI Grant Number 26420392, NSK Foundation's Research Grant for the Advancement of Mechatronics and the JST matching planner program.; 8th CIRP Conference on High Performance Cutting, HPC 2018 ; Conference date: 25-06-2018 Through 27-06-2018",

year = "2018",

doi = "10.1016/j.procir.2018.08.249",

language = "English",

volume = "77",

pages = "513--516",

journal = "Procedia CIRP",

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T2 - 8th CIRP Conference on High Performance Cutting, HPC 2018

AU - Uchiyama, Kosuke

AU - Murakami, Hiroshi

AU - Katsuki, Akio

AU - Sajima, Takao

AU - Yamamoto, Takahiko

AU - Nagata, Ryosuke

AU - Fujiyoshi, Kunitaka

N1 - Funding Information: This study was partly supported by the METI Supporting Industry Program, JSPS KAKENHI Grant Number 26420392, NSK Foundation's Research Grant for the Advancement of Mechatronics and the JST matching planner program.

PY - 2018

Y1 - 2018

N2 - In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.

AB - In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.

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JO - Procedia CIRP

JF - Procedia CIRP

Y2 - 25 June 2018 through 27 June 2018

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Fabrication of a fiber probe using a CO₂ laser for microstructure measurement: High functionality and durability test

Abstract

All Science Journal Classification (ASJC) codes

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