Fabrication of a fiber probe using a CO2 laser for microstructure measurement: High functionality and durability test

Kosuke Uchiyama, Hiroshi Murakami, Akio Katsuki, Takao Sajima, Takahiko Yamamoto, Ryosuke Nagata, Kunitaka Fujiyoshi

Research output: Contribution to journalConference article

1 Citation (Scopus)

Abstract

In recent years, the importance of measuring microstructures of mechanical microparts, micro holes, etc. has increased due to advances in microfabrication technology. Specifically, several microstructure measurement methods have been proposed with the objective of improving the functionality of devices. Therefore, we aim to develop a highly accurate measurement system with a low measurement force using a micro optical fiber probe. In this research, we conducted performance test of water repellent coating on a stylus tip to prevent adhesion to the measured surface by surface forces, in addition to durability tests.

Original languageEnglish
Pages (from-to)513-516
Number of pages4
JournalProcedia CIRP
Volume77
DOIs
Publication statusPublished - Jan 1 2018
Event8th CIRP Conference on High Performance Cutting, HPC 2018 - Budapest, Hungary
Duration: Jun 25 2018Jun 27 2018

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Industrial and Manufacturing Engineering

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