Fabrication of a microevaporator equipped with a piezoelectrically-driven diaphragm pump

Ken Ichiro Sotowa, Daigo Miyagawa, Guibing Zhao, Katsuki Kusakabe, Shigeharu Morooka, Koji Takahashi

Research output: Contribution to journalArticle

1 Citation (Scopus)

Abstract

An evaporator unit for use in microreactor systems was constructed. The unit consisted of a micropump driven by piezoelectricity and a microevaporator heated electrically by means of a Pt wire. The micropump was comprised of two tightly bonded plates; a silicon (100) plate having three diaphragms and a glass plate having valve and pump chambers. These flow conduits were patterned by photolithography and formed by wet-etching. The diaphragms, as well as the valve and pump chambers, were 7 mm in diameter, and were arranged triangularly. The discharge rates of the pumps were found to be dependent on the voltage and frequency applied to the piezo discs, the actuation pattern, the backpressure at the outlet, and the liquid viscosity. The pump assembled with an epoxy adhesive showed high discharge rates, while a similar one, assembled by anodic bonding, showed high discharge pressures. The flow rate of the former pump reached 60 ml/min for water. The microevaporator channel was wet-etched on a 10 mm × 40 mm silicon wafer, and a channel for a Pt wire heater was formed on the reverse side. Both sides of the silicon plate were covered with glass plates. Benzene, when pumped to the microevaporator, was evaporated to give a vapor flow rate of 6.8 cm3/min, which is sufficiently large as a feed rate for a gas-phase catalytic microreactor.

Original languageEnglish
Pages (from-to)7-13
Number of pages7
JournalJOURNAL OF CHEMICAL ENGINEERING OF JAPAN
Volume36
Issue number1
DOIs
Publication statusPublished - Jan 1 2003

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Diaphragms
Pumps
Fabrication
Silicon
Flow rate
Wire
Confined flow
Glass
Viscosity of liquids
Piezoelectricity
Wet etching
Photolithography
Evaporators
Benzene
Silicon wafers
Adhesives
Gases
Vapors
Water
Electric potential

All Science Journal Classification (ASJC) codes

  • Chemistry(all)
  • Chemical Engineering(all)

Cite this

Fabrication of a microevaporator equipped with a piezoelectrically-driven diaphragm pump. / Sotowa, Ken Ichiro; Miyagawa, Daigo; Zhao, Guibing; Kusakabe, Katsuki; Morooka, Shigeharu; Takahashi, Koji.

In: JOURNAL OF CHEMICAL ENGINEERING OF JAPAN, Vol. 36, No. 1, 01.01.2003, p. 7-13.

Research output: Contribution to journalArticle

Sotowa, Ken Ichiro ; Miyagawa, Daigo ; Zhao, Guibing ; Kusakabe, Katsuki ; Morooka, Shigeharu ; Takahashi, Koji. / Fabrication of a microevaporator equipped with a piezoelectrically-driven diaphragm pump. In: JOURNAL OF CHEMICAL ENGINEERING OF JAPAN. 2003 ; Vol. 36, No. 1. pp. 7-13.
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