@article{a86492c13eaf404ab4a1833333179c01,
title = "Fabrication of a robust in2o3 nanolines fet device as a biosensor platform",
abstract = "Field-effect transistors (FETs) are attractive biosensor platforms for rapid and accurate detection of various analytes through surface immobilization of specific bio-receptors. Since it is difficult to maintain the electrical stability of semiconductors of sensing channel under physiological conditions for long periods, passivation by a stable metal oxide dielectric layer, such as Al2O3 or HfO2, is currently used as a common method to prevent damage. However, protecting the sensing channel by passivation has the disadvantage that the distance between the target and the conductive channel increases, and the sensing signal will be degraded by Debye shielding. Even though many efforts use semiconductor materials directly as channels for biosensors, the electrical stability of semiconductors in the physiological environments has rarely been studied. In this work, an In2O3 nanolines FET device with high robustness in artificial physiological solution of phosphate buffered saline (PBS) was fabricated and used as a platform for biosensors without employing passivation on the sensing channel. The FET device demonstrated reproducibility with an average threshold voltage (VTH) of 5.235 V and a standard deviation (SD) of 0.382 V. We tested the robustness of the In2O3 nanolines FET device in PBS solution and found that the device had a long-term electrical stability in PBS with more than 9 days{\textquoteright} exposure. Finally, we demonstrated its applicability as a biosensor platform by testing the biosensing performance towards miR-21 targets after immobilizing the phosphonic acid terminated DNA probes. Since the surface immobilization of multiple bioreceptors is feasible, we demonstrate that the robust In2O3 FET device can be an excellent biosensor platform for biosensors.",
author = "Zetao Zhu and Takao Yasui and Quanli Liu and Kazuki Nagashima and Tsunaki Takahashi and Taisuke Shimada and Takeshi Yanagida and Yoshinobu Baba",
note = "Funding Information: Funding: This research was supported by the Japan Science and Technology Agency (JST) PRESTO (JPMJPR19H9), the JST SICORP(JPMJSC19E3), AMED Medical Research and Development Program (JP21he2302007), the JSPS Grant-in-Aid for Young Scientists (A) 17H04803, the JSPS Grant-in-Aid for Scientific Research (S) 18H05243, the JSPS Grant-in-Aid for Exploratory Research 20K21124, the JSPS Grant-in-Aid for Scientific Research on Innovative Areas “Chemistry for Multimolecular Crowding Biosystems”, and research grants from each of the following: the Murata Science Foundation, Advanced Technology Institute Research Grants 2019, Tatematsu Foundation of Public Interest, the Nitto Foundation, the G-7 Scholarship Foundation, the Nanotechnology Platform Program (Molecule and Material Synthesis) of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), and the Cooperative Research Program of the “Network Joint Research Center for Materials and Devices”. Funding Information: This research was supported by the Japan Science and Technology Agency (JST) PRESTO (JPMJPR19H9), the JST SICORP(JPMJSC19E3), AMED Medical Research and Development Program (JP21he2302007), the JSPS Grant-in-Aid for Young Scientists (A) 17H04803, the JSPS Grant-in-Aid for Scientific Research (S) 18H05243, the JSPS Grant-in-Aid for Exploratory Research 20K21124, the JSPS Grant-in-Aid for Scientific Research on Innovative Areas {\textquoteleft}Chemistry for Multimolecular Crowding Biosystems{\textquoteright}, and research grants from each of the following: The Murata Science Foundation, Advanced Technology Institute Research Grants 2019, Tatematsu Foundation of Public Interest, the Nitto Foundation, the G-7 Scholarship Foundation, the Nanotechnology Platform Program (Molecule and Material Synthesis) of the Ministry of Education, Culture, Sports, Science and Technology (MEXT), and the Cooperative Research Program of the {\textquoteleft}Network Joint Research Center for Materials and Devices{\textquoteright}. Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland.",
year = "2021",
month = jun,
doi = "10.3390/mi12060642",
language = "English",
volume = "12",
journal = "Micromachines",
issn = "2072-666X",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "6",
}