Abstract
A novel integrated optical micro-encoder based on diffraction is presented, which can measure the relative distance traveled against a grating (scale) in the grating vector direction. A measurement resolution of less than 0.01 μm is possible. The encoder is extremely small, only 500-μm square, which is 1/100 the size of conventional encoders. Therefore, the encoder can be incorporated into a micro-machine and can be moved at high speed, since its inertia is extremely low. This encoder can be used even when the gap between the encoder and the grating is a few hundred micrometers.
| Original language | English |
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| Title of host publication | Proceedings. IEEE Micro Electro Mechanical Systems |
| Publisher | Publ by IEEE |
| Pages | 233-238 |
| Number of pages | 6 |
| ISBN (Print) | 0879426411 |
| Publication status | Published - 1991 |
| Externally published | Yes |
| Event | Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 - Nara, Jpn Duration: Jan 30 1991 → Feb 2 1991 |
Other
| Other | Proceedings of the 1991 IEEE Micro Electro Mechanical Systems - MEMS '91 |
|---|---|
| City | Nara, Jpn |
| Period | 1/30/91 → 2/2/91 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering