Abstract
An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.
| Original language | English |
|---|---|
| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 337-342 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - Jan 1 1994 |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: Jan 25 1994 → Jan 28 1994 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 1/25/94 → 1/28/94 |
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
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Cite this
Sawada, R., Ohguchi, O., Mise, K., & Tsubamoto, M. (1994). Fabrication of advanced integrated optical micro-encoder chip. In An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (pp. 337-342). Publ by IEEE.