Fabrication of advanced integrated optical micro-encoder chip

Renshi Sawada, O. Ohguchi, K. Mise, M. Tsubamoto

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Citations (Scopus)

Abstract

An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

Original languageEnglish
Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PublisherPubl by IEEE
Pages337-342
Number of pages6
ISBN (Print)078031834X
Publication statusPublished - 1994
Externally publishedYes
EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
Duration: Jan 25 1994Jan 28 1994

Other

OtherProceedings of the IEEE Micro Electro Mechanical Systems
CityOiso, Jpn
Period1/25/941/28/94

Fingerprint

Optical films
Fabrication
Polyimides
Semiconductor lasers
Lenses
Refractive index
Waveguides

All Science Journal Classification (ASJC) codes

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Sawada, R., Ohguchi, O., Mise, K., & Tsubamoto, M. (1994). Fabrication of advanced integrated optical micro-encoder chip. In An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems (pp. 337-342). Publ by IEEE.

Fabrication of advanced integrated optical micro-encoder chip. / Sawada, Renshi; Ohguchi, O.; Mise, K.; Tsubamoto, M.

An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. Publ by IEEE, 1994. p. 337-342.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sawada, R, Ohguchi, O, Mise, K & Tsubamoto, M 1994, Fabrication of advanced integrated optical micro-encoder chip. in An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. Publ by IEEE, pp. 337-342, Proceedings of the IEEE Micro Electro Mechanical Systems, Oiso, Jpn, 1/25/94.
Sawada R, Ohguchi O, Mise K, Tsubamoto M. Fabrication of advanced integrated optical micro-encoder chip. In An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. Publ by IEEE. 1994. p. 337-342
Sawada, Renshi ; Ohguchi, O. ; Mise, K. ; Tsubamoto, M. / Fabrication of advanced integrated optical micro-encoder chip. An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. Publ by IEEE, 1994. pp. 337-342
@inproceedings{e796be9707fb471aa273595d26e34e74,
title = "Fabrication of advanced integrated optical micro-encoder chip",
abstract = "An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.",
author = "Renshi Sawada and O. Ohguchi and K. Mise and M. Tsubamoto",
year = "1994",
language = "English",
isbn = "078031834X",
pages = "337--342",
booktitle = "An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems",
publisher = "Publ by IEEE",

}

TY - GEN

T1 - Fabrication of advanced integrated optical micro-encoder chip

AU - Sawada, Renshi

AU - Ohguchi, O.

AU - Mise, K.

AU - Tsubamoto, M.

PY - 1994

Y1 - 1994

N2 - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

AB - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

UR - http://www.scopus.com/inward/record.url?scp=0028014976&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028014976&partnerID=8YFLogxK

M3 - Conference contribution

SN - 078031834X

SP - 337

EP - 342

BT - An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems

PB - Publ by IEEE

ER -