Abstract
An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.
| Original language | English |
|---|---|
| Title of host publication | An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems |
| Publisher | Publ by IEEE |
| Pages | 337-342 |
| Number of pages | 6 |
| ISBN (Print) | 078031834X |
| Publication status | Published - 1994 |
| Externally published | Yes |
| Event | Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: Jan 25 1994 → Jan 28 1994 |
Other
| Other | Proceedings of the IEEE Micro Electro Mechanical Systems |
|---|---|
| City | Oiso, Jpn |
| Period | 1/25/94 → 1/28/94 |
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All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Mechanical Engineering
- Electrical and Electronic Engineering
Cite this
Fabrication of advanced integrated optical micro-encoder chip. / Sawada, Renshi; Ohguchi, O.; Mise, K.; Tsubamoto, M.
An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems. Publ by IEEE, 1994. p. 337-342.Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
}
TY - GEN
T1 - Fabrication of advanced integrated optical micro-encoder chip
AU - Sawada, Renshi
AU - Ohguchi, O.
AU - Mise, K.
AU - Tsubamoto, M.
PY - 1994
Y1 - 1994
N2 - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.
AB - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.
UR - http://www.scopus.com/inward/record.url?scp=0028014976&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0028014976&partnerID=8YFLogxK
M3 - Conference contribution
SN - 078031834X
SP - 337
EP - 342
BT - An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
PB - Publ by IEEE
ER -