Fabrication of advanced integrated optical micro-encoder chip

Renshi Sawada, O. Ohguchi, K. Mise, M. Tsubamoto

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    8 Citations (Scopus)


    An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

    Original languageEnglish
    Title of host publicationAn Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
    PublisherPubl by IEEE
    Number of pages6
    ISBN (Print)078031834X
    Publication statusPublished - Jan 1 1994
    EventProceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn
    Duration: Jan 25 1994Jan 28 1994


    OtherProceedings of the IEEE Micro Electro Mechanical Systems
    CityOiso, Jpn

    All Science Journal Classification (ASJC) codes

    • Control and Systems Engineering
    • Mechanical Engineering
    • Electrical and Electronic Engineering


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