Fabrication of advanced integrated optical micro-encoder chip

Renshi Sawada; O. Ohguchi; K. Mise; M. Tsubamoto

Fabrication of advanced integrated optical micro-encoder chip

Renshi Sawada, O. Ohguchi, K. Mise, M. Tsubamoto

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

Original language	English
Title of host publication	An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems
Publisher	Publ by IEEE
Pages	337-342
Number of pages	6
ISBN (Print)	078031834X
Publication status	Published - Jan 1 1994
Event	Proceedings of the IEEE Micro Electro Mechanical Systems - Oiso, Jpn Duration: Jan 25 1994 → Jan 28 1994

Other

Other	Proceedings of the IEEE Micro Electro Mechanical Systems
City	Oiso, Jpn
Period	1/25/94 → 1/28/94

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Mechanical Engineering
Electrical and Electronic Engineering

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@inproceedings{e796be9707fb471aa273595d26e34e74,

title = "Fabrication of advanced integrated optical micro-encoder chip",

abstract = "An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.",

author = "Renshi Sawada and O. Ohguchi and K. Mise and M. Tsubamoto",

year = "1994",

month = jan,

day = "1",

language = "English",

isbn = "078031834X",

pages = "337--342",

booktitle = "An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems",

publisher = "Publ by IEEE",

note = "Proceedings of the IEEE Micro Electro Mechanical Systems ; Conference date: 25-01-1994 Through 28-01-1994",

}

TY - GEN

T1 - Fabrication of advanced integrated optical micro-encoder chip

AU - Sawada, Renshi

AU - Ohguchi, O.

AU - Mise, K.

AU - Tsubamoto, M.

PY - 1994/1/1

Y1 - 1994/1/1

N2 - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

AB - An advanced integrated optical microencoder whose traveling direction relative to a grating scale can also be detected and whose traveling displacement can be measured with a resolution on the order of 0.01 microns was developed. Combination of laser diode, polyimide waveguides, and optical films such as a 90° phase-shifting film and gradient-refractive-index-lens film resulted in a microencoder small enough to be placed with a volume of a few cubic millimeters.

UR - http://www.scopus.com/inward/record.url?scp=0028014976&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0028014976&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:0028014976

SN - 078031834X

SP - 337

EP - 342

BT - An Investigations of Micro Structures, Sensors, Actuators, Machines and Robotic Systems

PB - Publ by IEEE

T2 - Proceedings of the IEEE Micro Electro Mechanical Systems

Y2 - 25 January 1994 through 28 January 1994

ER -

Fabrication of advanced integrated optical micro-encoder chip

Abstract

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All Science Journal Classification (ASJC) codes

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