Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

Original languageEnglish
Title of host publicationXXI IMEKO World Congress "Measurement in Research and Industry"
PublisherIMEKO-International Measurement Federation Secretariat
Publication statusPublished - 2015
Event21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic
Duration: Aug 30 2015Sep 4 2015

Other

Other21st IMEKO World Congress on Measurement in Research and Industry
CountryCzech Republic
CityPrague
Period8/30/159/4/15

Fingerprint

Glues
Curing
Optical fibers
Resins
Finite element method
Fabrication
Microstructure
Acids

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

Cite this

Murakami, H., Katsuki, A., Sajima, T., Fukuda, M., Okada, M., & Nagaura, M. (2015). Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology. In XXI IMEKO World Congress "Measurement in Research and Industry" IMEKO-International Measurement Federation Secretariat.

Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology. / Murakami, Hiroshi; Katsuki, Akio; Sajima, Takao; Fukuda, Mitsuyoshi; Okada, Masaki; Nagaura, Megumu.

XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Murakami, H, Katsuki, A, Sajima, T, Fukuda, M, Okada, M & Nagaura, M 2015, Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology. in XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 21st IMEKO World Congress on Measurement in Research and Industry, Prague, Czech Republic, 8/30/15.
Murakami H, Katsuki A, Sajima T, Fukuda M, Okada M, Nagaura M. Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology. In XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat. 2015
Murakami, Hiroshi ; Katsuki, Akio ; Sajima, Takao ; Fukuda, Mitsuyoshi ; Okada, Masaki ; Nagaura, Megumu. / Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology. XXI IMEKO World Congress "Measurement in Research and Industry". IMEKO-International Measurement Federation Secretariat, 2015.
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