Fabrication of an ultra-small-diameter optical fiber probe for 3D micro metrology

Hiroshi Murakami, Akio Katsuki, Takao Sajima, Mitsuyoshi Fukuda, Masaki Okada, Megumu Nagaura

Research output: Contribution to conferencePaperpeer-review

Abstract

This paper presents a system for 3D micro structure measurement using an optical fiber probe. A stylus shaft with a diameter of 0.4 μm was fabricated using an acid-etch technique and the characteristics of the stylus shaft in the process of displacement detection were described. The deformation of the stylus tip caused by the contraction of the ultraviolet curing resin, which was used to glue the stylus shaft to the stylus sphere, was analyzed by a finite element method.

Original languageEnglish
Publication statusPublished - 2015
Event21st IMEKO World Congress on Measurement in Research and Industry - Prague, Czech Republic
Duration: Aug 30 2015Sep 4 2015

Other

Other21st IMEKO World Congress on Measurement in Research and Industry
CountryCzech Republic
CityPrague
Period8/30/159/4/15

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

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