Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition

Rong Tu, Xian Zhang, Youfeng Lai, Mingxu Han, Song Zhang, Ji Shi, Haiwen Li, Takashi Goto, Lianmeng Zhang

Research output: Contribution to journalArticle

Abstract

Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.

Original languageEnglish
Pages (from-to)1004-1011
Number of pages8
JournalInternational Journal of Applied Ceramic Technology
Volume16
Issue number3
DOIs
Publication statusPublished - May 1 2019

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Graphite
halides
Chemical vapor deposition
induction
graphite
vapor deposition
tubes
coatings
Fabrication
Coatings
fabrication
Deposition rates
crystallinity
Nuclear industry
nuclear reactors
Nuclear reactors
flat surfaces
Temperature distribution
temperature distribution
textures

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Condensed Matter Physics
  • Marketing
  • Materials Chemistry

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Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition. / Tu, Rong; Zhang, Xian; Lai, Youfeng; Han, Mingxu; Zhang, Song; Shi, Ji; Li, Haiwen; Goto, Takashi; Zhang, Lianmeng.

In: International Journal of Applied Ceramic Technology, Vol. 16, No. 3, 01.05.2019, p. 1004-1011.

Research output: Contribution to journalArticle

Tu, Rong ; Zhang, Xian ; Lai, Youfeng ; Han, Mingxu ; Zhang, Song ; Shi, Ji ; Li, Haiwen ; Goto, Takashi ; Zhang, Lianmeng. / Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition. In: International Journal of Applied Ceramic Technology. 2019 ; Vol. 16, No. 3. pp. 1004-1011.
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AU - Han, Mingxu

AU - Zhang, Song

AU - Shi, Ji

AU - Li, Haiwen

AU - Goto, Takashi

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