TY - JOUR
T1 - Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition
AU - Tu, Rong
AU - Zhang, Xian
AU - Lai, Youfeng
AU - Han, Mingxu
AU - Zhang, Song
AU - Shi, Ji
AU - Li, Haiwen
AU - Goto, Takashi
AU - Zhang, Lianmeng
N1 - Funding Information:
This work was supported by the Science Challenge Project (No. TZ2016001) and, the National Natural Science Foundation of China (Nos. 51372188, 51521001, 5171102150, and 51872212) and by the 111 Project (B13035). The research was also supported by the International Science and Technology Cooperation Program of China (2014DFA53090), the Natural Science Foundation of Hubei Province, China (2016CFA006), the Fundamental Research Funds for the Central Universities (WUT: 2017YB004 and 2018III016), and the State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT, Grant No. 2019-KF-12).
Funding Information:
National Natural Science Foundation of China, Grant/Award Number: 51372188, 51521001, 5171102150, 51872212; Fundamental Research Funds for the Central Universities, Grant/Award Number: WUT: 2017YB004, WUT: 2018III016; Natural Science Foundation of Hubei Province, Grant/Award Number: 2016CFA006; 111 Project, Grant/Award Number: B13035; Science Challenge Project, Grant/Award Number: TZ2016001; State Key Laboratory of Advanced Technology for Materials Synthesis and Processing, Grant/Award Number: WUT, Grant No: 2019-KF-12; International Science & Technology Cooperation Program of China, Grant/ Award Number: 2014DFA53090
Funding Information:
This work was supported by the Science Challenge Project (No. TZ2016001) and, the National Natural Science Foundation of China (Nos. 51372188, 51521001, 5171102150, and 51872212) and by the 111 Project (B13035). The research was also supported by the International Science and Technology Cooperation Program of China (2014DFA53090), the Natural Science Foundation of Hubei Province, China (2016CFA006), the Fundamental Research Funds for the Central Universities (WUT: 2017YB004 and 2018III016), and the State Key Laboratory of Advanced Technology for Materials Synthesis and Processing (WUT, Grant No. 2019‐ KF‐12).
Publisher Copyright:
© 2019 The American Ceramic Society
PY - 2019/5/1
Y1 - 2019/5/1
N2 - Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.
AB - Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.
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U2 - 10.1111/ijac.13194
DO - 10.1111/ijac.13194
M3 - Article
AN - SCOPUS:85061481780
VL - 16
SP - 1004
EP - 1011
JO - International Journal of Applied Ceramic Technology
JF - International Journal of Applied Ceramic Technology
SN - 1546-542X
IS - 3
ER -