Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition

Rong Tu, Xian Zhang, Youfeng Lai, Mingxu Han, Song Zhang, Ji Shi, Haiwen Li, Takashi Goto, Lianmeng Zhang

Research output: Contribution to journalArticlepeer-review

Abstract

Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.

Original languageEnglish
Pages (from-to)1004-1011
Number of pages8
JournalInternational Journal of Applied Ceramic Technology
Volume16
Issue number3
DOIs
Publication statusPublished - May 1 2019

All Science Journal Classification (ASJC) codes

  • Ceramics and Composites
  • Condensed Matter Physics
  • Marketing
  • Materials Chemistry

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