Abstract
Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.
| Original language | English |
|---|---|
| Pages (from-to) | 1004-1011 |
| Number of pages | 8 |
| Journal | International Journal of Applied Ceramic Technology |
| Volume | 16 |
| Issue number | 3 |
| DOIs | |
| Publication status | Published - May 1 2019 |
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All Science Journal Classification (ASJC) codes
- Ceramics and Composites
- Condensed Matter Physics
- Marketing
- Materials Chemistry
Cite this
Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition. / Tu, Rong; Zhang, Xian; Lai, Youfeng; Han, Mingxu; Zhang, Song; Shi, Ji; Li, Haiwen; Goto, Takashi; Zhang, Lianmeng.
In: International Journal of Applied Ceramic Technology, Vol. 16, No. 3, 01.05.2019, p. 1004-1011.Research output: Contribution to journal › Article
}
TY - JOUR
T1 - Fabrication of an ultra-thick-oriented 3C-SiC coating on the inner surface of a graphite tube by high-frequency induction-heated halide chemical vapor deposition
AU - Tu, Rong
AU - Zhang, Xian
AU - Lai, Youfeng
AU - Han, Mingxu
AU - Zhang, Song
AU - Shi, Ji
AU - Li, Haiwen
AU - Goto, Takashi
AU - Zhang, Lianmeng
PY - 2019/5/1
Y1 - 2019/5/1
N2 - Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.
AB - Cubic SiC (3C-SiC) is a promising material for nuclear industry applications due to its excellent properties. In this report, a highly oriented thick 3C-SiC coating with good crystallinity was prepared on the inner surface of a monolithic graphite tube via high-frequency induction-heated halide chemical vapor deposition using SiCl 4 , CH 4 , and H 2 as precursors. The texture coefficient (T C (hkl) ), microstructure, and deposition rate along the tube axis was studied. 3C-SiC coating with a high (111) orientation and crystallinity was obtained. Along the tube axis, T C (111) was consistent with the temperature distribution. The surficial morphology of the 3C-SiC coating changed from pebble-like to hexangular facet and then to hemispherical. The deposition rate and coating thickness were 300 μm/h and 615 μm, respectively, which is sufficiently rapid and thick enough to obtain free-standing SiC tubes for nuclear reactors.
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UR - http://www.scopus.com/inward/citedby.url?scp=85061481780&partnerID=8YFLogxK
U2 - 10.1111/ijac.13194
DO - 10.1111/ijac.13194
M3 - Article
AN - SCOPUS:85061481780
VL - 16
SP - 1004
EP - 1011
JO - International Journal of Applied Ceramic Technology
JF - International Journal of Applied Ceramic Technology
SN - 1546-542X
IS - 3
ER -