Fabrication of carbon-based field emitters using a stamp technology

Akiyoshi Baba, Masafumi Hizukuri, Masakazu Iwamoto, Tanemasa Asano

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

We proposed and demonstrated stamp technology, a new and simple method for fabricating carbon-based (photoresist and polyimide) field emitters. It is possible to completely transfer the shape of the mold to emitter materials. In spite of the fact that the emitter is prepared in the wedge shape, emission current up to μA was obtained. This new technology is very attractive for large-area devices, since large-area stamping is easily done by using the step and repeat technique.

Original languageEnglish
Title of host publication1999 International Microprocesses and Nanotechnology Conference
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages182-183
Number of pages2
ISBN (Electronic)4930813972, 9784930813978
DOIs
Publication statusPublished - Jan 1 1999
Event1999 International Microprocesses and Nanotechnology Conference - Yokohama, Japan
Duration: Jul 6 1999Jul 8 1999

Publication series

Name1999 International Microprocesses and Nanotechnology Conference

Other

Other1999 International Microprocesses and Nanotechnology Conference
CountryJapan
CityYokohama
Period7/6/997/8/99

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering
  • Electronic, Optical and Magnetic Materials

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  • Cite this

    Baba, A., Hizukuri, M., Iwamoto, M., & Asano, T. (1999). Fabrication of carbon-based field emitters using a stamp technology. In 1999 International Microprocesses and Nanotechnology Conference (pp. 182-183). [797537] (1999 International Microprocesses and Nanotechnology Conference). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/IMNC.1999.797537