Fabrication of carbon-based field emitters using stamp technology

Akiyoshi Baba, Masafumi Hizukuri, Masakazu Iwamoto, Tanemasa Asano

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

We propose and demonstrate stamp technology, a novel processing technique for a field electron emitter, in which emitter tips are fabricated by pressing a mold into a spin-coated organic material to completely transform the shape of the mold. The material is then modified by ion irradiation to produce a carbon-based emitter material. Starting materials tested were a high-temperature-cured polyimide and a photoresist (novolac resin). The shape of the mold can be completely transferred to these materials at pressure over 700 MPa at 250°C. A field-emission current up to the order of μA is obtained from emitters fabricated by this new technology with modification using Ar-ion irradiation at an energy of 100 keV to a dose of 3 × 1016cm-2. The ion-beam-irradiation effect on polyimide and photoresist materials is also investigated in terms of electrical conductivity and chemical bonds.

Original languageEnglish
Pages (from-to)7203-7207
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Volume38
Issue number12 B
DOIs
Publication statusPublished - Jan 1 1999

All Science Journal Classification (ASJC) codes

  • Engineering(all)
  • Physics and Astronomy(all)

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