Fabrication of carbon-based field emitters using stamp technology

Akiyoshi Baba, Masafumi Hizukuri, Masakazu Iwamoto, Tanemasa Asano

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

We propose and demonstrate stamp technology, a novel processing technique for a field electron emitter, in which emitter tips are fabricated by pressing a mold into a spin-coated organic material to completely transform the shape of the mold. The material is then modified by ion irradiation to produce a carbon-based emitter material. Starting materials tested were a high-temperature-cured polyimide and a photoresist (novolac resin). The shape of the mold can be completely transferred to these materials at pressure over 700 MPa at 250°C. A field-emission current up to the order of μA is obtained from emitters fabricated by this new technology with modification using Ar-ion irradiation at an energy of 100 keV to a dose of 3 × 1016cm-2. The ion-beam-irradiation effect on polyimide and photoresist materials is also investigated in terms of electrical conductivity and chemical bonds.

Original languageEnglish
Pages (from-to)7203-7207
Number of pages5
JournalJapanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes
Volume38
Issue number12 B
Publication statusPublished - 1999
Externally publishedYes

Fingerprint

emitters
Fabrication
fabrication
Carbon
carbon
ion irradiation
polyimides
photoresists
Photoresists
Ion bombardment
Polyimides
pressing
chemical bonds
organic materials
resins
field emission
Chemical bonds
ion beams
Field emission
dosage

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

Cite this

Fabrication of carbon-based field emitters using stamp technology. / Baba, Akiyoshi; Hizukuri, Masafumi; Iwamoto, Masakazu; Asano, Tanemasa.

In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes, Vol. 38, No. 12 B, 1999, p. 7203-7207.

Research output: Contribution to journalArticle

Baba, Akiyoshi ; Hizukuri, Masafumi ; Iwamoto, Masakazu ; Asano, Tanemasa. / Fabrication of carbon-based field emitters using stamp technology. In: Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes. 1999 ; Vol. 38, No. 12 B. pp. 7203-7207.
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