Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application

Nur Hamizah Zainal Ariffin, Hafizal Yahaya, Shunji Shinano, Satoru Tanaka, Abdul Manaf Hashim

Research output: Contribution to journalArticle

5 Citations (Scopus)

Abstract

We report the fabrication of conical shape micropore structures on silicon nitride/silicon (Si3N4/Si) substrate to function as a fluidic channel as well as a supporting structure for sensing membrane. Excellent shape of conical structure with large diameter of top hole size and small diameter of bottom hole size (1-2 μm) was successfully fabricated by utilizing a combination of grinding process, fine polishing and multistep focused ion beam (FIB) milling. A so-called re-deposition phenomena seems to be unavoidable in the multistep FIB milling resulted to the formation of tip-like structure at every milling step. Low surface roughness is effective in improving the shape of circumference of the milling area. The possibility to integrate such conical shape structure with graphene was also demonstrated. This result opens up the breakthrough towards new generation of analytical platform for biosensor application.

Original languageEnglish
Pages (from-to)1-5
Number of pages5
JournalMicroelectronic Engineering
Volume133
DOIs
Publication statusPublished - May 2 2015

Fingerprint

Focused ion beams
Silicon
Silicon nitride
bioinstrumentation
Biosensors
silicon nitrides
ion beams
Fabrication
fabrication
Graphite
Fluidics
silicon
Polishing
Graphene
Surface roughness
Membranes
circumferences
fluidics
Substrates
grinding

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering

Cite this

Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application. / Ariffin, Nur Hamizah Zainal; Yahaya, Hafizal; Shinano, Shunji; Tanaka, Satoru; Hashim, Abdul Manaf.

In: Microelectronic Engineering, Vol. 133, 02.05.2015, p. 1-5.

Research output: Contribution to journalArticle

Ariffin, Nur Hamizah Zainal ; Yahaya, Hafizal ; Shinano, Shunji ; Tanaka, Satoru ; Hashim, Abdul Manaf. / Fabrication of conical micropore structure on silicon nitride/silicon using focused ion beam milling for biosensor application. In: Microelectronic Engineering. 2015 ; Vol. 133. pp. 1-5.
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