Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Akinori Furuya, Fusao Shimokawa, Tohru Matsuura, Renshi Sawada

Research output: Contribution to journalArticle

18 Citations (Scopus)

Abstract

Magnetically controlled reactive ion etching (MC-RIE) of a fluorinated polyimide substrate achieved etching selectivity of up to 2600, resulting in a smoothly etched surface and structures hundreds of micrometers high having good perpendicularity. This technique is useful for three-dimensional microfabrication. As an example of a typical application, we fabricated an ion drag integrated micropump with microgrid sets consisting of 100 μm high pole-shaped counter-electrode elements arranged like a pair of interleaved combs by using a fluorinated polyimide as the structural material, metallization, and lift-off using a ZnO sacrificial layer. This micropump moved ethanol with a flow rate of about 2.0 nl s-1 when 200 V was applied to the counter electrodes.

Original languageEnglish
Pages (from-to)310-319
Number of pages10
JournalJournal of Micromechanics and Microengineering
Volume6
Issue number3
DOIs
Publication statusPublished - Sep 1 1996

Fingerprint

Reactive ion etching
polyimides
Polyimides
drag
Drag
counters
etching
Ions
Fabrication
Electrodes
fabrication
electrodes
Microfabrication
Metallizing
micrometers
Etching
Poles
ions
Ethanol
ethyl alcohol

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump. / Furuya, Akinori; Shimokawa, Fusao; Matsuura, Tohru; Sawada, Renshi.

In: Journal of Micromechanics and Microengineering, Vol. 6, No. 3, 01.09.1996, p. 310-319.

Research output: Contribution to journalArticle

@article{2f2fe27fe9674647ba6815185ed880c0,
title = "Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump",
abstract = "Magnetically controlled reactive ion etching (MC-RIE) of a fluorinated polyimide substrate achieved etching selectivity of up to 2600, resulting in a smoothly etched surface and structures hundreds of micrometers high having good perpendicularity. This technique is useful for three-dimensional microfabrication. As an example of a typical application, we fabricated an ion drag integrated micropump with microgrid sets consisting of 100 μm high pole-shaped counter-electrode elements arranged like a pair of interleaved combs by using a fluorinated polyimide as the structural material, metallization, and lift-off using a ZnO sacrificial layer. This micropump moved ethanol with a flow rate of about 2.0 nl s-1 when 200 V was applied to the counter electrodes.",
author = "Akinori Furuya and Fusao Shimokawa and Tohru Matsuura and Renshi Sawada",
year = "1996",
month = "9",
day = "1",
doi = "10.1088/0960-1317/6/3/003",
language = "English",
volume = "6",
pages = "310--319",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing Ltd.",
number = "3",

}

TY - JOUR

T1 - Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

AU - Furuya, Akinori

AU - Shimokawa, Fusao

AU - Matsuura, Tohru

AU - Sawada, Renshi

PY - 1996/9/1

Y1 - 1996/9/1

N2 - Magnetically controlled reactive ion etching (MC-RIE) of a fluorinated polyimide substrate achieved etching selectivity of up to 2600, resulting in a smoothly etched surface and structures hundreds of micrometers high having good perpendicularity. This technique is useful for three-dimensional microfabrication. As an example of a typical application, we fabricated an ion drag integrated micropump with microgrid sets consisting of 100 μm high pole-shaped counter-electrode elements arranged like a pair of interleaved combs by using a fluorinated polyimide as the structural material, metallization, and lift-off using a ZnO sacrificial layer. This micropump moved ethanol with a flow rate of about 2.0 nl s-1 when 200 V was applied to the counter electrodes.

AB - Magnetically controlled reactive ion etching (MC-RIE) of a fluorinated polyimide substrate achieved etching selectivity of up to 2600, resulting in a smoothly etched surface and structures hundreds of micrometers high having good perpendicularity. This technique is useful for three-dimensional microfabrication. As an example of a typical application, we fabricated an ion drag integrated micropump with microgrid sets consisting of 100 μm high pole-shaped counter-electrode elements arranged like a pair of interleaved combs by using a fluorinated polyimide as the structural material, metallization, and lift-off using a ZnO sacrificial layer. This micropump moved ethanol with a flow rate of about 2.0 nl s-1 when 200 V was applied to the counter electrodes.

UR - http://www.scopus.com/inward/record.url?scp=0030230547&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0030230547&partnerID=8YFLogxK

U2 - 10.1088/0960-1317/6/3/003

DO - 10.1088/0960-1317/6/3/003

M3 - Article

AN - SCOPUS:0030230547

VL - 6

SP - 310

EP - 319

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 3

ER -