Fabrication of fluorinated polyimide microgrids using magnetically controlled reactive ion etching (MC-RIE) and their applications to an ion drag integrated micropump

Akinori Furuya, Fusao Shimokawa, Tohru Matsuura, Renshi Sawada

    Research output: Contribution to journalArticlepeer-review

    18 Citations (Scopus)

    Abstract

    Magnetically controlled reactive ion etching (MC-RIE) of a fluorinated polyimide substrate achieved etching selectivity of up to 2600, resulting in a smoothly etched surface and structures hundreds of micrometers high having good perpendicularity. This technique is useful for three-dimensional microfabrication. As an example of a typical application, we fabricated an ion drag integrated micropump with microgrid sets consisting of 100 μm high pole-shaped counter-electrode elements arranged like a pair of interleaved combs by using a fluorinated polyimide as the structural material, metallization, and lift-off using a ZnO sacrificial layer. This micropump moved ethanol with a flow rate of about 2.0 nl s-1 when 200 V was applied to the counter electrodes.

    Original languageEnglish
    Pages (from-to)310-319
    Number of pages10
    JournalJournal of Micromechanics and Microengineering
    Volume6
    Issue number3
    DOIs
    Publication statusPublished - Sep 1 1996

    All Science Journal Classification (ASJC) codes

    • Electronic, Optical and Magnetic Materials
    • Mechanics of Materials
    • Mechanical Engineering
    • Electrical and Electronic Engineering

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