Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection

H. Nakagawa; K. Joosse; H. Akoh; M. Aoyagi; S. Takada; K. Maehata; K. Ishibashi

Fabrication of high quality Nb/AlO_x/Nb superconducting tunnel junctions for radiation detection

H. Nakagawa, K. Joosse, H. Akoh, M. Aoyagi, S. Takada, K. Maehata, K. Ishibashi

Applied Nuclear Physics

Research output: Contribution to journal › Article › peer-review

Abstract

A fabrication of high quality Nb/AlO_x/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO₂ insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio R_d/R_n of 6 × 10⁶ for 200 × 200μm² STJ with a critical current density of 200A/cm².

Original language	English
Pages (from-to)	17-23
Number of pages	7
Journal	Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
Volume	61
Issue number	6-7
Publication status	Published - Dec 1 1997

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Electrical and Electronic Engineering

Cite this

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title = "Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection",

abstract = "A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.",

author = "H. Nakagawa and K. Joosse and H. Akoh and M. Aoyagi and S. Takada and K. Maehata and K. Ishibashi",

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T1 - Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection

AU - Nakagawa, H.

AU - Joosse, K.

AU - Akoh, H.

AU - Aoyagi, M.

AU - Takada, S.

AU - Maehata, K.

AU - Ishibashi, K.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

AB - A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

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Fabrication of high quality Nb/AlO_x/Nb superconducting tunnel junctions for radiation detection

Abstract

All Science Journal Classification (ASJC) codes

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