Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection

H. Nakagawa, K. Joosse, H. Akoh, M. Aoyagi, S. Takada, K. Maehata, K. Ishibashi

Research output: Contribution to journalArticle

Abstract

A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

Original languageEnglish
Pages (from-to)17-23
Number of pages7
JournalDenshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory
Volume61
Issue number6-7
Publication statusPublished - Dec 1 1997

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Tunnel junctions
tunnel junctions
Radiation
Fabrication
fabrication
radiation
critical current
current density
Nitrogen plasma
nitrogen plasma
Critical currents
Passivation
passivity
Current density
insulators
Thin films
thin films
Temperature
temperature

All Science Journal Classification (ASJC) codes

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

Cite this

Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection. / Nakagawa, H.; Joosse, K.; Akoh, H.; Aoyagi, M.; Takada, S.; Maehata, K.; Ishibashi, K.

In: Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory, Vol. 61, No. 6-7, 01.12.1997, p. 17-23.

Research output: Contribution to journalArticle

Nakagawa, H. ; Joosse, K. ; Akoh, H. ; Aoyagi, M. ; Takada, S. ; Maehata, K. ; Ishibashi, K. / Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection. In: Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory. 1997 ; Vol. 61, No. 6-7. pp. 17-23.
@article{1fbd675507604050954ce16c024ce37d,
title = "Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection",
abstract = "A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.",
author = "H. Nakagawa and K. Joosse and H. Akoh and M. Aoyagi and S. Takada and K. Maehata and K. Ishibashi",
year = "1997",
month = "12",
day = "1",
language = "English",
volume = "61",
pages = "17--23",
journal = "Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory",
issn = "0366-9092",
publisher = "Denshi Gijutsu Sogo Kenkyujo",
number = "6-7",

}

TY - JOUR

T1 - Fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions for radiation detection

AU - Nakagawa, H.

AU - Joosse, K.

AU - Akoh, H.

AU - Aoyagi, M.

AU - Takada, S.

AU - Maehata, K.

AU - Ishibashi, K.

PY - 1997/12/1

Y1 - 1997/12/1

N2 - A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

AB - A fabrication of high quality Nb/AlOx/Nb superconducting tunnel junctions (STJs) for radiation detection is presented. The fabrication process includes a MgO thin film, an underlayer method, a control of critical current, a nitrogen plasma passivation and a SiO2 insulator. Subgap current characteristics of STJs have been investigated and compared with conventional STJs in the temperature range of 0.35K to 4.2K in order to evaluate the junction quality for radiation detection. The STJs made by present process showed extremely high quality junction characteristics of a subgap current density of 0.1pA/μm, a resistance ratio Rd/Rn of 6 × 106 for 200 × 200μm2 STJ with a critical current density of 200A/cm2.

UR - http://www.scopus.com/inward/record.url?scp=0031342329&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0031342329&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:0031342329

VL - 61

SP - 17

EP - 23

JO - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory

JF - Denshi Gijutsu Sogo Kenkyusho Iho/Bulletin of the Electrotechnical Laboratory

SN - 0366-9092

IS - 6-7

ER -