Fabrication of InP/SiC structure using surface activated direct bonding

Y. Fan, T. Maekawa, K. Watanabe, R. Takigawa

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Fabrication of InP/SiC structure using surface activated direct bonding'. Together they form a unique fingerprint.

Material Science