Abstract
A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.
Original language | English |
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Pages (from-to) | 126-131 |
Number of pages | 6 |
Journal | Sensors and Actuators, A: Physical |
Volume | 80 |
Issue number | 2 |
DOIs | |
Publication status | Published - Mar 10 2000 |
Event | 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA Duration: Jan 17 1999 → Jan 21 1999 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Instrumentation
- Condensed Matter Physics
- Surfaces, Coatings and Films
- Metals and Alloys
- Electrical and Electronic Engineering