Fabrication of micro IC probe for LSI testing

Ito Takahiro, Renshi Sawada, Eiji Higurashi

Research output: Contribution to journalConference article

19 Citations (Scopus)

Abstract

A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.

Original languageEnglish
Pages (from-to)126-131
Number of pages6
JournalSensors and Actuators, A: Physical
Volume80
Issue number2
DOIs
Publication statusPublished - Mar 10 2000
Externally publishedYes
Event12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA
Duration: Jan 17 1999Jan 21 1999

Fingerprint

large scale integration
Fabrication
fabrication
probes
Micromachining
Testing
Contact resistance
micromachining
contact resistance
deflection
electric contacts
costs
requirements
Costs

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films
  • Metals and Alloys
  • Electrical and Electronic Engineering

Cite this

Fabrication of micro IC probe for LSI testing. / Takahiro, Ito; Sawada, Renshi; Higurashi, Eiji.

In: Sensors and Actuators, A: Physical, Vol. 80, No. 2, 10.03.2000, p. 126-131.

Research output: Contribution to journalConference article

Takahiro, Ito ; Sawada, Renshi ; Higurashi, Eiji. / Fabrication of micro IC probe for LSI testing. In: Sensors and Actuators, A: Physical. 2000 ; Vol. 80, No. 2. pp. 126-131.
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