Fabrication of micro IC probe for LSI testing

Ito Takahiro; Renshi Sawada; Eiji Higurashi

doi:10.1016/S0924-4247(99)00257-5

Fabrication of micro IC probe for LSI testing

Ito Takahiro, Renshi Sawada, Eiji Higurashi

Research output: Contribution to journal › Conference article › peer-review

20 Citations (Scopus)

Abstract

A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.

Original language	English
Pages (from-to)	126-131
Number of pages	6
Journal	Sensors and Actuators, A: Physical
Volume	80
Issue number	2
DOIs	https://doi.org/10.1016/S0924-4247(99)00257-5
Publication status	Published - Mar 10 2000
Event	12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99) - Orlando, FL, USA Duration: Jan 17 1999 → Jan 21 1999

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Instrumentation
Condensed Matter Physics
Surfaces, Coatings and Films
Metals and Alloys
Electrical and Electronic Engineering

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title = "Fabrication of micro IC probe for LSI testing",

abstract = "A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.",

author = "Ito Takahiro and Renshi Sawada and Eiji Higurashi",

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AU - Takahiro, Ito

AU - Sawada, Renshi

AU - Higurashi, Eiji

PY - 2000/3/10

Y1 - 2000/3/10

N2 - A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.

AB - A micro IC probe, which is a small, elastic electrical contact, has been developed to improve LSI testing and reduce its cost. No larger than 300×80 μm, it is fabricated with a pitch of 100 μm by micromachining techniques. Its contact resistance is less than 0.5 Ω, satisfying the requirements for conventional probes, and its deflection is 2 to 8 μm to accommodate height differences among LSI pads while maintaining contact.

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DO - 10.1016/S0924-4247(99)00257-5

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JO - Sensors and Actuators, A: Physical

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T2 - 12th IEEE International Workshop on Micro Electro Mechanical Systems (MEMS-99)

Y2 - 17 January 1999 through 21 January 1999

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