Fabrication of Micro Patterned Ceramic Structure by Imprinting Process

Yang Xu, Fujio Tsumori, Hyung-Goo Kang, Hideshi Miura

Research output: Contribution to journalArticlepeer-review

Abstract

In this report, an improved fabrication method of micro powder imprinting (μPI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8 μm were obtained on 300 μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.
Original languageEnglish
Pages (from-to)673-678
Number of pages6
JournalJournal of the Japan Society of Powder and Powder Metallurgy
Volume58
Issue number11
DOIs
Publication statusPublished - Nov 15 2011

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