TY - JOUR
T1 - Fabrication of Micro Patterned Ceramic Structure by Imprinting Process
AU - Xu, Yang
AU - Tsumori, Fujio
AU - Kang, Hyung-Goo
AU - Miura, Hideshi
PY - 2011/11/15
Y1 - 2011/11/15
N2 - In this report, an improved fabrication method of micro powder imprinting (μPI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8 μm were obtained on 300 μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.
AB - In this report, an improved fabrication method of micro powder imprinting (μPI), which has the industrial value in reducing of the cost and procedures, is introduced to fabricate the thin yttria-stabilized zirconia (YSZ) sheet with the micrometer scale patterns. The Kapton film mold was designed and employed in thermal imprinting in order to prevent the breakage of sheet as mold removing. After imprinting, debinding and sintering procedures, the well pattern consistence line and space patterns in scale of 8 μm were obtained on 300 μm thick ceramic sheets. The morphology of sintered ceramic patterns was observed and the behaviors of debinding and sintering were investigated in this report. Meanwhile, the imprinting on bilayer ceramic sheet was carried out and the results showed the well wave interface of each layer, which have the potential utilization for solid oxide fuel cell directly.
U2 - 10.2497/jjspm.58.673
DO - 10.2497/jjspm.58.673
M3 - Article
VL - 58
SP - 673
EP - 678
JO - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
JF - Funtai Oyobi Fummatsu Yakin/Journal of the Japan Society of Powder and Powder Metallurgy
SN - 0532-8799
IS - 11
ER -