Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

T. Arakawa, H. Kudo, H. Sato, H. Kobayashi, T. Izumi, S. Ohtsuka, K. Mori, S. Shoji, T. Osaka, T. Homma, K. Mitsuda, N. Yamasaki, R. Fujimoto, Naoko Iyomoto, T. Oshima, K. Futamoto, Y. Takei, T. Ichitsubo, T. Fujimori, K. Yoshida & 11 others Y. Ishisaki, U. Morita, T. Koga, K. Shinozaki, K. Sato, N. Takai, T. Ohashi, Y. Kuroda, M. Onishi, M. Goto, F. Beppu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

Original languageEnglish
Pages (from-to)456-459
Number of pages4
JournalNuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume520
Issue number1-3
DOIs
Publication statusPublished - Mar 11 2004
Externally publishedYes

Fingerprint

calorimeters
absorbers
Pixels
pixels
Fabrication
X rays
fabrication
x rays
Photolithography
photolithography
Calorimeters
Image sensors
Electrodeposition
electrodeposition
wafers
membranes
Membranes
Imaging techniques
Finite element method
simulation

All Science Journal Classification (ASJC) codes

  • Nuclear and High Energy Physics
  • Instrumentation

Cite this

Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber. / Arakawa, T.; Kudo, H.; Sato, H.; Kobayashi, H.; Izumi, T.; Ohtsuka, S.; Mori, K.; Shoji, S.; Osaka, T.; Homma, T.; Mitsuda, K.; Yamasaki, N.; Fujimoto, R.; Iyomoto, Naoko; Oshima, T.; Futamoto, K.; Takei, Y.; Ichitsubo, T.; Fujimori, T.; Yoshida, K.; Ishisaki, Y.; Morita, U.; Koga, T.; Shinozaki, K.; Sato, K.; Takai, N.; Ohashi, T.; Kuroda, Y.; Onishi, M.; Goto, M.; Beppu, F.

In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 520, No. 1-3, 11.03.2004, p. 456-459.

Research output: Contribution to journalArticle

Arakawa, T, Kudo, H, Sato, H, Kobayashi, H, Izumi, T, Ohtsuka, S, Mori, K, Shoji, S, Osaka, T, Homma, T, Mitsuda, K, Yamasaki, N, Fujimoto, R, Iyomoto, N, Oshima, T, Futamoto, K, Takei, Y, Ichitsubo, T, Fujimori, T, Yoshida, K, Ishisaki, Y, Morita, U, Koga, T, Shinozaki, K, Sato, K, Takai, N, Ohashi, T, Kuroda, Y, Onishi, M, Goto, M & Beppu, F 2004, 'Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber', Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 520, no. 1-3, pp. 456-459. https://doi.org/10.1016/j.nima.2003.11.371
Arakawa, T. ; Kudo, H. ; Sato, H. ; Kobayashi, H. ; Izumi, T. ; Ohtsuka, S. ; Mori, K. ; Shoji, S. ; Osaka, T. ; Homma, T. ; Mitsuda, K. ; Yamasaki, N. ; Fujimoto, R. ; Iyomoto, Naoko ; Oshima, T. ; Futamoto, K. ; Takei, Y. ; Ichitsubo, T. ; Fujimori, T. ; Yoshida, K. ; Ishisaki, Y. ; Morita, U. ; Koga, T. ; Shinozaki, K. ; Sato, K. ; Takai, N. ; Ohashi, T. ; Kuroda, Y. ; Onishi, M. ; Goto, M. ; Beppu, F. / Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber. In: Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment. 2004 ; Vol. 520, No. 1-3. pp. 456-459.
@article{b8273981e0be4828b5a9b67664501cf9,
title = "Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber",
abstract = "We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.",
author = "T. Arakawa and H. Kudo and H. Sato and H. Kobayashi and T. Izumi and S. Ohtsuka and K. Mori and S. Shoji and T. Osaka and T. Homma and K. Mitsuda and N. Yamasaki and R. Fujimoto and Naoko Iyomoto and T. Oshima and K. Futamoto and Y. Takei and T. Ichitsubo and T. Fujimori and K. Yoshida and Y. Ishisaki and U. Morita and T. Koga and K. Shinozaki and K. Sato and N. Takai and T. Ohashi and Y. Kuroda and M. Onishi and M. Goto and F. Beppu",
year = "2004",
month = "3",
day = "11",
doi = "10.1016/j.nima.2003.11.371",
language = "English",
volume = "520",
pages = "456--459",
journal = "Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",
issn = "0168-9002",
publisher = "Elsevier",
number = "1-3",

}

TY - JOUR

T1 - Fabrication of multi-pixel TES microcalorimeters with an electrodeposited Sn absorber and Bi absorber

AU - Arakawa, T.

AU - Kudo, H.

AU - Sato, H.

AU - Kobayashi, H.

AU - Izumi, T.

AU - Ohtsuka, S.

AU - Mori, K.

AU - Shoji, S.

AU - Osaka, T.

AU - Homma, T.

AU - Mitsuda, K.

AU - Yamasaki, N.

AU - Fujimoto, R.

AU - Iyomoto, Naoko

AU - Oshima, T.

AU - Futamoto, K.

AU - Takei, Y.

AU - Ichitsubo, T.

AU - Fujimori, T.

AU - Yoshida, K.

AU - Ishisaki, Y.

AU - Morita, U.

AU - Koga, T.

AU - Shinozaki, K.

AU - Sato, K.

AU - Takai, N.

AU - Ohashi, T.

AU - Kuroda, Y.

AU - Onishi, M.

AU - Goto, M.

AU - Beppu, F.

PY - 2004/3/11

Y1 - 2004/3/11

N2 - We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

AB - We have developed multi-pixel TES microcalorimeters in order to realize high-energy resolution and X-ray imaging. A Sn absorber and a Bi absorber were formed on Si3N4 and SiO2 membrane using two-step exposure photolithography and electrodeposition. A FEM analysis was carried out to investigate the performance of the X-ray microabsorbers. In addition, a superconducting through-wafer interconnection was demonstrated considering the future X-ray imager using microcalorimeters. Detail of the fabrication techniques, characteristics and simulation results of two types of the microabsorbers, as well as those of the calorimeters are described.

UR - http://www.scopus.com/inward/record.url?scp=12144291237&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=12144291237&partnerID=8YFLogxK

U2 - 10.1016/j.nima.2003.11.371

DO - 10.1016/j.nima.2003.11.371

M3 - Article

VL - 520

SP - 456

EP - 459

JO - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

SN - 0168-9002

IS - 1-3

ER -