Fabrication of nanoparticle composite porous films having ultralow dielectric constant

Shota Nunomura; Kazunori Koga; Masaharu Shiratani; Yukio Watanabe; Yoshinori Morisada; Nobuo Matsuki; Shingo Ikeda

doi:10.1143/JJAP.44.L1509

Fabrication of nanoparticle composite porous films having ultralow dielectric constant

Shota Nunomura, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Yoshinori Morisada, Nobuo Matsuki, Shingo Ikeda

Research output: Contribution to journal › Article

41 Citations (Scopus)

Abstract

Nanoparticle composite porous films having a dielectric constant of ε, = 1.7-3.5 have been deposited using plasma chemical vapor deposition. Nanoparticles as nano-building blocks and radicals as adhesives are generated in plasmas, and nanoparticles are deposited together with radicals on substrates to form porous films. Nano-sized pores are dispersed in the films and their dielectric constants are controlled by the concentrations of pores, i.e., their porosities. The method is applicable to depositing nanoparticle composite porous films for other applications.

Original language	English
Pages (from-to)	L1509-L1511
Journal	Japanese Journal of Applied Physics, Part 2: Letters
Volume	44
Issue number	50-52
DOIs	https://doi.org/10.1143/JJAP.44.L1509
Publication status	Published - Dec 16 2005

All Science Journal Classification (ASJC) codes

Engineering(all)
Physics and Astronomy (miscellaneous)
Physics and Astronomy(all)

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10.1143/JJAP.44.L1509

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Nunomura, S., Koga, K., Shiratani, M., Watanabe, Y., Morisada, Y., Matsuki, N., & Ikeda, S. (2005). Fabrication of nanoparticle composite porous films having ultralow dielectric constant. Japanese Journal of Applied Physics, Part 2: Letters, 44(50-52), L1509-L1511. https://doi.org/10.1143/JJAP.44.L1509

Fabrication of nanoparticle composite porous films having ultralow dielectric constant. / Nunomura, Shota; Koga, Kazunori ; Shiratani, Masaharu ; Watanabe, Yukio; Morisada, Yoshinori; Matsuki, Nobuo; Ikeda, Shingo.

In: Japanese Journal of Applied Physics, Part 2: Letters, Vol. 44, No. 50-52, 16.12.2005, p. L1509-L1511.

Research output: Contribution to journal › Article

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