Fabrication of nanoparticle composite porous films having ultralow dielectric constant

Shota Nunomura, Kazunori Koga, Masaharu Shiratani, Yukio Watanabe, Yoshinori Morisada, Nobuo Matsuki, Shingo Ikeda

Research output: Contribution to journalArticle

41 Citations (Scopus)

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Engineering & Materials Science

Physics & Astronomy