TY - GEN
T1 - Fabrication of PMMA micropillars by reactive ion etching towards separation of white and red blood cells
AU - Ito, Satoru
AU - Yasui, Takao
AU - Okamoto, Yukihiro
AU - Kaji, Noritada
AU - Tokeshi, Manabu
AU - Baba, Yoshinobu
PY - 2012
Y1 - 2012
N2 - Fine, high aspect ratio, and smooth surface micropillars, which never realized by conventional hot-embossing fabrication method, were fabricated on poly(methyl methacrylate) (PMMA) substrates by reactive ion etching (RIE). The separation ability of PMMA micropillars for microbeads as pseudo erythrocytes and leukocytes are comparable to Si micropillars, while the features of PMMA are superior to Si in terms of disposability, cost, and surface treatment.
AB - Fine, high aspect ratio, and smooth surface micropillars, which never realized by conventional hot-embossing fabrication method, were fabricated on poly(methyl methacrylate) (PMMA) substrates by reactive ion etching (RIE). The separation ability of PMMA micropillars for microbeads as pseudo erythrocytes and leukocytes are comparable to Si micropillars, while the features of PMMA are superior to Si in terms of disposability, cost, and surface treatment.
UR - http://www.scopus.com/inward/record.url?scp=84901791274&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=84901791274&partnerID=8YFLogxK
M3 - Conference contribution
AN - SCOPUS:84901791274
SN - 9780979806452
T3 - Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
SP - 1234
EP - 1236
BT - Proceedings of the 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
PB - Chemical and Biological Microsystems Society
T2 - 16th International Conference on Miniaturized Systems for Chemistry and Life Sciences, MicroTAS 2012
Y2 - 28 October 2012 through 1 November 2012
ER -