Fabrication of probe tips for nanoscale 3D metrology

K. Uchiyama, H. Murakami, A. Katsuki, Takao Sajima, T. Yamamoto, R. Nagata, K. Fujiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - 32nd ASPE Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages305-310
Number of pages6
ISBN (Electronic)9781887706742
Publication statusPublished - Jan 1 2016
Event32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 - Chartlotte, United States
Duration: Oct 29 2017Nov 3 2017

Publication series

NameProceedings - 32nd ASPE Annual Meeting

Other

Other32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017
CountryUnited States
CityChartlotte
Period10/29/1711/3/17

Fingerprint

probe
Fabrication
metrology

All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology
  • Mechanical Engineering

Cite this

Uchiyama, K., Murakami, H., Katsuki, A., Sajima, T., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2016). Fabrication of probe tips for nanoscale 3D metrology. In Proceedings - 32nd ASPE Annual Meeting (pp. 305-310). (Proceedings - 32nd ASPE Annual Meeting). American Society for Precision Engineering, ASPE.

Fabrication of probe tips for nanoscale 3D metrology. / Uchiyama, K.; Murakami, H.; Katsuki, A.; Sajima, Takao; Yamamoto, T.; Nagata, R.; Fujiyoshi, K.

Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. p. 305-310 (Proceedings - 32nd ASPE Annual Meeting).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Uchiyama, K, Murakami, H, Katsuki, A, Sajima, T, Yamamoto, T, Nagata, R & Fujiyoshi, K 2016, Fabrication of probe tips for nanoscale 3D metrology. in Proceedings - 32nd ASPE Annual Meeting. Proceedings - 32nd ASPE Annual Meeting, American Society for Precision Engineering, ASPE, pp. 305-310, 32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017, Chartlotte, United States, 10/29/17.
Uchiyama K, Murakami H, Katsuki A, Sajima T, Yamamoto T, Nagata R et al. Fabrication of probe tips for nanoscale 3D metrology. In Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE. 2016. p. 305-310. (Proceedings - 32nd ASPE Annual Meeting).
Uchiyama, K. ; Murakami, H. ; Katsuki, A. ; Sajima, Takao ; Yamamoto, T. ; Nagata, R. ; Fujiyoshi, K. / Fabrication of probe tips for nanoscale 3D metrology. Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. pp. 305-310 (Proceedings - 32nd ASPE Annual Meeting).
@inproceedings{ddb7b8dfe0994271937bdc6379ad7c7f,
title = "Fabrication of probe tips for nanoscale 3D metrology",
author = "K. Uchiyama and H. Murakami and A. Katsuki and Takao Sajima and T. Yamamoto and R. Nagata and K. Fujiyoshi",
year = "2016",
month = "1",
day = "1",
language = "English",
series = "Proceedings - 32nd ASPE Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "305--310",
booktitle = "Proceedings - 32nd ASPE Annual Meeting",

}

TY - GEN

T1 - Fabrication of probe tips for nanoscale 3D metrology

AU - Uchiyama, K.

AU - Murakami, H.

AU - Katsuki, A.

AU - Sajima, Takao

AU - Yamamoto, T.

AU - Nagata, R.

AU - Fujiyoshi, K.

PY - 2016/1/1

Y1 - 2016/1/1

UR - http://www.scopus.com/inward/record.url?scp=85040325664&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85040325664&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:85040325664

T3 - Proceedings - 32nd ASPE Annual Meeting

SP - 305

EP - 310

BT - Proceedings - 32nd ASPE Annual Meeting

PB - American Society for Precision Engineering, ASPE

ER -