Fabrication of probe tips for nanoscale 3D metrology

K. Uchiyama, H. Murakami, A. Katsuki, T. Sajima, T. Yamamoto, R. Nagata, K. Fujiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationProceedings - 32nd ASPE Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages305-310
Number of pages6
ISBN (Electronic)9781887706742
Publication statusPublished - 2016
Event32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 - Chartlotte, United States
Duration: Oct 29 2017Nov 3 2017

Publication series

NameProceedings - 32nd ASPE Annual Meeting

Other

Other32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017
CountryUnited States
CityChartlotte
Period10/29/1711/3/17

All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology
  • Mechanical Engineering

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