@inproceedings{ddb7b8dfe0994271937bdc6379ad7c7f,
title = "Fabrication of probe tips for nanoscale 3D metrology",
author = "K. Uchiyama and H. Murakami and A. Katsuki and T. Sajima and T. Yamamoto and R. Nagata and K. Fujiyoshi",
note = "Funding Information: This study was partly supported by METI Supporting Industry Program, JSPS KAKENHI Grant Number 26420392, NSK Foundation's Research Grant for the Advancement of Mechatronics and JST matching planner program.; 32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 ; Conference date: 29-10-2017 Through 03-11-2017",
year = "2016",
language = "English",
series = "Proceedings - 32nd ASPE Annual Meeting",
publisher = "American Society for Precision Engineering, ASPE",
pages = "305--310",
booktitle = "Proceedings - 32nd ASPE Annual Meeting",
}