Fabrication of probe tips for nanoscale 3D metrology

K. Uchiyama, H. Murakami, A. Katsuki, Takao Sajima, T. Yamamoto, R. Nagata, K. Fujiyoshi

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original languageEnglish
Title of host publicationProceedings - 32nd ASPE Annual Meeting
PublisherAmerican Society for Precision Engineering, ASPE
Pages305-310
Number of pages6
ISBN (Electronic)9781887706742
Publication statusPublished - Jan 1 2016
Event32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017 - Chartlotte, United States
Duration: Oct 29 2017 → Nov 3 2017

Publication series

NameProceedings - 32nd ASPE Annual Meeting

Other

Other32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017
CountryUnited States
CityChartlotte
Period10/29/17 → 11/3/17

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probe
Fabrication
metrology

All Science Journal Classification (ASJC) codes

  • Geochemistry and Petrology
  • Mechanical Engineering

Cite this

Uchiyama, K., Murakami, H., Katsuki, A., Sajima, T., Yamamoto, T., Nagata, R., & Fujiyoshi, K. (2016). Fabrication of probe tips for nanoscale 3D metrology. In Proceedings - 32nd ASPE Annual Meeting (pp. 305-310). (Proceedings - 32nd ASPE Annual Meeting). American Society for Precision Engineering, ASPE.

Fabrication of probe tips for nanoscale 3D metrology. / Uchiyama, K.; Murakami, H.; Katsuki, A.; Sajima, Takao; Yamamoto, T.; Nagata, R.; Fujiyoshi, K.

Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. p. 305-310 (Proceedings - 32nd ASPE Annual Meeting).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Uchiyama, K, Murakami, H, Katsuki, A, Sajima, T, Yamamoto, T, Nagata, R & Fujiyoshi, K 2016, Fabrication of probe tips for nanoscale 3D metrology. in Proceedings - 32nd ASPE Annual Meeting. Proceedings - 32nd ASPE Annual Meeting, American Society for Precision Engineering, ASPE, pp. 305-310, 32nd Annual Meeting of the American Society for Precision Engineering, ASPE 2017, Chartlotte, United States, 10/29/17.
Uchiyama K, Murakami H, Katsuki A, Sajima T, Yamamoto T, Nagata R et al. Fabrication of probe tips for nanoscale 3D metrology. In Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE. 2016. p. 305-310. (Proceedings - 32nd ASPE Annual Meeting).
Uchiyama, K. ; Murakami, H. ; Katsuki, A. ; Sajima, Takao ; Yamamoto, T. ; Nagata, R. ; Fujiyoshi, K. / Fabrication of probe tips for nanoscale 3D metrology. Proceedings - 32nd ASPE Annual Meeting. American Society for Precision Engineering, ASPE, 2016. pp. 305-310 (Proceedings - 32nd ASPE Annual Meeting).
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