FABRICATION OF SELF-ALIGNMENT MICRO-CONTACT JOSEPHSON JUNCTIONS.

Nobumitsu Hirose, Yuuichi Harada, Shigeru Yoshimori, Mitsuo Kawamura

Research output: Contribution to journalConference article

Abstract

We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.

Original languageEnglish
Pages (from-to)425-426
Number of pages2
JournalTransactions of the Institute of Electronics and Communication Engineers of Japan. Section E
VolumeE69
Issue number4
Publication statusPublished - Apr 1 1986
Externally publishedYes
EventPap from 1986 Natl Conv IECE Jpn - Niigata, Jpn
Duration: Mar 23 1986Mar 26 1986

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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