We fabricated micro-contact Josephson junctions by self-alignment process, using double-layer-resist electron beam exposure and RIE. We chose NB as superconductive materials. The junctions show the Josephson effect under millimeter wave (70 GHz) radiation less than 100 mu w and the 7th Shapiro step.
|Number of pages||2|
|Journal||Transactions of the Institute of Electronics and Communication Engineers of Japan. Section E|
|Publication status||Published - Apr 1 1986|
|Event||Pap from 1986 Natl Conv IECE Jpn - Niigata, Jpn|
Duration: Mar 23 1986 → Mar 26 1986
All Science Journal Classification (ASJC) codes